JP2500685Y2 - X-ray irradiation type analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an X-ray irradiation type analyzer capable of irradiating a sample with a plurality of types of X-ray flux.

(Prior Art) In various analysis methods using X-rays, it is necessary to change the X-ray irradiation method according to the purpose of analysis.

For example, when measuring a slight energy difference such as a chemical shift by X-ray photoelectron spectroscopy, it is desirable that the characteristic width of the characteristic X-ray for excitation used is as small as possible. Al or Mg is often used as the target of the X-ray source, and the Kα ray of Al has a rather wide characteristic width but high strength, and the Kα ray of Mg has a slightly lower strength but a smaller characteristic width. Therefore, it is desirable to use them properly according to the purpose of measurement. In addition to the characteristic width of the characteristic X-ray for excitation, satellite rays existing in the vicinity of the characteristic X-ray, for example, Kα for AlKα1,2
X-ray like 3,4. As a method of narrowing the intrinsic width of the excited X-rays and excluding the satellite rays described above, the sample is not directly irradiated from the X-ray source, but is once separated into X-rays of a specific wavelength.
A method of irradiating a sample only with lines has also been proposed. When this method is used, the irradiation X-ray intensity is significantly lower than that of direct irradiation, so it is practically necessary to select direct irradiation or post-spectral irradiation depending on the measurement purpose.

Conventionally, when selecting such an X-ray type, the X-ray source device itself is selected. That is, in general, one X-ray irradiation type analyzer cannot switch and select the X-ray source, and the analysis method that can be executed is limited. Regarding the wavelength of X-rays, an X-ray irradiation type analyzer in which a plurality of types of targets are incorporated in one X-ray tube and characteristic X-rays of various wavelengths can be obtained by electrically selecting which target is selected. However, direct irradiation of X-rays and post-spectral irradiation are arbitrarily selected, or X-ray flux for irradiating a certain area of the sample surface with X-rays of the same or different wavelengths and convergence to one point on the sample surface. An X-ray irradiation type analyzer that can arbitrarily select the X-ray flux to be used has not been proposed.

(Problem to be Solved by the Invention) An object of the present invention is to obtain an X-ray irradiation type analyzer in which the X-ray irradiation method can be selected by a simple switching operation.

(Means for Solving the Problem) In an analyzer of a type that irradiates a sample with X-rays and analyzes secondary radiation emitted from the sample, X-rays are directly applied to the sample.
X-ray source having an X-ray emission point of one target material for irradiating a ray and another X-ray emission point of a different target material at different positions on one anode, and an X-ray on a sample An X-ray spectroscopic crystal arranged on one Roland circle passing through the irradiation point and the other X-ray radiation of the X-ray source, and the X-ray emission point of the two X-ray emission points on the anode in the X-ray source. An electron beam source was arranged for each, and it was possible to switch which electron beam source was activated.

Alternatively, in an analyzer that irradiates a sample with X-rays and analyzes secondary radiation emitted from the sample, an X-ray source including an anode having one X-ray emission point and an electron beam source is used.
The position is variable, and at one position of the X-ray source, the sample is directly irradiated with X-rays from an X-ray emission point on the anode,
The dispersive crystal was placed on one Roland circle passing through the X-ray emitting point on the anode at another position of the radiation source and the X-ray irradiating point on the sample.

(Operation) According to the above configuration, in the X-ray irradiation type analyzer, X
By providing two X-ray emission points at the radiation source,
Direct irradiation of X-rays is performed from the radiation emission point to irradiate the sample with the broad-area irradiation X-ray flux. From the other X-ray emission point, the sample is irradiated with the monochromatic focusing X-ray flux via the dispersive crystal. In order to obtain two X-ray emission points as X-ray sources, one anode is provided with two X-ray emission points separately, and the two X-ray emission points can be selected by switching the electron beam source. Alternatively, by rotating the anode provided with one X-ray emitting point, the position of this X-ray emitting point can be changed to two positions, and two X-ray emitting points can be selected.

(Embodiment) FIG. 1 shows an embodiment of the present invention. No. 1 is an anode made of copper and is adapted to be cooled by passing water through it. The Mg target 2 is embedded on one surface of the anode, and the Al target 3 is embedded on the other surface. Four
Is a filament disposed obliquely in front of the Mg target 2, and a Wehnelt electrode 5 is inserted between the anode and the filament 4, and the electrons emitted from the filament 4 draw a curved orbit to the target 2. Clash,
The target 3 emits continuous X-rays and some characteristic X-rays of Mg. These X-rays irradiate the sample S directly through the Al X-ray transmission window 6 provided in front of the target 2. For the sample S, the Al target 3 is on the back side of the anode 1. A filament 7 is arranged to face the target 3, and a Wehnelt electrode 8 is arranged on the front surface of the filament so that the electrons emitted from the filament 7 are concentrated on the surface of the target 3 and from there, continuous X-rays and Al Some characteristic X-rays are emitted. These X-rays are made incident on the curved crystal 10 for spectroscopy through the diaphragm 9 which appropriately limits the spread of the X-ray flux. Spectral crystal
10 is an electron irradiation point on the target 3, the dispersive crystal 10 itself, and the X-ray emission point on the sample S are located on one Rowland circle determined by the curvature of the dispersive crystal, and X emitted from the Al target. Only one characteristic X-ray of the rays, for example, the Kα ray of Al is reflected and focused on the sample S. An X-ray tube outer casing 11 is provided with a window 6 and a diaphragm 9. The window 6 is formed of a film of Al or the like so that electrons from the filament do not directly enter the sample because the filament 4 is located at a position facing the sample S. The diaphragm 9 has the filament 7 behind the anode as seen from the sample,
Since the aperture itself is opened in the direction opposite to the sample, there is no possibility that electrons from the filament 7 will enter the linear sample, and therefore it is merely an aperture.

The anode 1 is connected to the positive electrode side of a high voltage power source 12 of an X-ray source, and both filaments 4 and 7 and an outer casing 11 are grounded. The selection of the two targets 2 and 3 is made depending on which of the filaments 4 and 7 is energized. E is a spectroscopic system of X-ray photoelectrons emitted from the sample S, 13 is an electron lens, and 14 is an electron energy analyzer.

In the above embodiment, the materials of the targets 2 and 3 are changed,
Wide-area irradiation X-ray flux and converging monochromatic X-ray flux are selected together with selection of X-ray wavelength, but it is possible to select only wide-range irradiation or concentrated irradiation of X-ray flux by using two targets of the same material. You can also

FIG. 2 shows another embodiment of the present invention, in which parts corresponding to those of the embodiment of FIG. In this embodiment, the same target is used. The anode 1, the filament 4, and the Wehnelt electrode 5 are held on the same stem 15, and are rotatable with respect to the outer casing 11 about the center line of the stem 15 (perpendicular to the plane of the drawing). Anode 1
The target 2 is buried in the side surface of the. When the target 2 is turned around the anode so as to face the sample S, the X-rays irradiate the linear sample S through the window 6, and the X-ray flux at this time is a broad irradiation X-ray flux. When the anode is rotated 180 ° from this position so that the target 2 is located on the rear side of the target 1 as viewed from the sample, the X-rays emitted from the target toward the diaphragm 9 of the outer casing 11 The X-ray having a specific wavelength is reflected by the dispersive crystal 10 and is made to converge on one point on the sample S.

(Effects of the Invention) According to the present invention, X-rays having different properties can be obtained only by rotating one component such as electrical switching or rotation of the anode with a common anode, and one X-ray source. It becomes possible to perform multipurpose analysis with an X-ray irradiation type analyzer using the.

[Brief description of drawings]

FIG. 1 is a vertical sectional side view of an apparatus according to an embodiment of the present invention, and FIG. 2 is a vertical sectional side view of an essential part of another embodiment of the present invention. 1 ... Anode, 2,3 ... Target, 4,7 ... Filament,
6 ... X-ray transmission window, 9 ... diaphragm, 10 ... dispersive crystal, 11 ... outer casing,
12 ... High-voltage power supply, 13 ... Electron lens, 14 ... Electron energy analyzer, S ... Sample.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-47-27078 (JP, A) JP-A-62-255900 (JP, A) Jikken 55-20054 (JP, Y2)

Claims (2)

(57) [Scope of utility model registration request] 1. An X-ray emission point of one target material that directly irradiates a sample with X-rays in an analyzer that irradiates the sample with X-rays and analyzes secondary radiation emitted from the sample. An X-ray source having X-ray emission points of a target material different from those of the other former at different positions on one anode, an X-ray irradiation point on a sample, and the other X-ray emission point of the X-ray source. And a crystal for X-ray spectroscopy arranged on one Roland circle passing through, and an electron beam source is arranged for each of the two X-ray emission points on the anode in the X-ray source. X-ray irradiation type analyzer capable of switching whether to operate the electron beam source of. 2. An X-ray analyzer for irradiating a sample with X-rays and analyzing the secondary radiation emitted from the sample.
An X-ray source consisting of an anode having a line emission point and an electron beam source is positionally variable in two positions, and at one position of the X-ray source, the sample is directly irradiated with X-rays from the X-ray emission point on the anode,
An X-ray irradiation type analyzer comprising a dispersive crystal arranged on one Rowland circle passing through the X-ray emitting point on the anode and the X-ray emitting point on the sample at another position of the X-ray source.