JPS62139316A - Wafer process treatment device - Google Patents

Abstract

PURPOSE:To obtain the titled treatment device with which a pertinent treatment is performed at each unit by a method wherein a control number is given to every wafer lot received, the control number is stored by type of treatment storing position, the control number is transferred between the treatment the storing positions when the wafer is shifted, and the wafer shifted between control units is identified by the control number. CONSTITUTION:When a wafer is placed on a treatment device, its lot number is sent to a controlling device 10 through a control unit 20 and a circuit 50, and the corresponding control number and the condition of treatment are sent to the unit 30. Said treatment is completed by the unit 20, and the wafer and the control number corresponding to it are automatically sent to the unit 30. When a different lot is received, the unit 30 sends the lot number to the control device 10, and the unit 30 receives the corresponding condition of treatment and a treatment is performed. The same procedure as above is repeated subsequently. When a new control number is going to be used, the unit 20 generates (81) the new control number when it receives a wafer, and the control number is stored in memory 21-28 through information wires 51-58. When the treatment is finished, a signal is generated (81) on the unit 20, and the stored informations 21-28 are transmitted (61-68).

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a wafer processing apparatus used for manufacturing semiconductor devices, and in particular, this wafer processing apparatus is composed of a plurality of independent control units in terms of control structure. The present invention relates to an improvement in which process control for each wafer lot is automatically performed when performing single wafer processing.

[Technical background of the invention and its problems] Conventionally, in this type of wafer processing apparatus, when a lot is input to each control unit, a lot number is generally instructed to the control section from the outside via an interface. It is. In this case, the lot number can be specified by inputting it from a keyboard, inputting it using a punch card or magnetic card, or automatically recognizing it using a barcode reader, wafer mark reader, or the like.

Methods for lot identification from the start of processing to the end of processing after specifying a lot number include methods that do not introduce lots in series, methods that provide physical space between lots, methods of control based on the number of wafers, and methods of identifying There are methods for re-recognizing points (manually or using wafer marks).

By the way, from the viewpoint of space saving, low cost, and unmanned operation, input methods using keyboards, punch cards, and magnetic cards rely on manual input for lot recognition when inputting lots, and full automation is desired in the future. Not common. Further, automatic recognition methods using barcode readers are currently becoming mainstream, but when incorporating them into a device, consideration must be given to space, cost, and media.

Furthermore, although the automatic recognition method using a wafer mark reader is the most reliable in terms of lot management, it has problems with wafer yield and manufacturing cost.

Next, regarding lot identification during processing, a method that does not input lots consecutively is out of the question, and a method of providing physical space between lots is also unreasonable to define that space is between lots, so it will not be used in the future. It seems unlikely. Furthermore, the method of controlling by counting the number of wafers is good when everything is going well, but if the number of wafers deviates, it becomes a big problem and is not suitable for unmanned operation. Again at a specific point!
i! The method using a wafer mark reader is also completely meaningless because it requires manual labor, and the method using a wafer mark reader has problems in terms of wafer yield and manufacturing cost, and has problems in practical use.

[Object of the Invention] The present invention has been made in consideration of the above-mentioned circumstances, and its purpose is to enable accurate lot identification in wafer processing, and to save space and reduce the cost of equipment.
The object of the present invention is to provide a wafer processing apparatus that can realize westernization.

[Summary of the Invention] In order to achieve the above object, the present invention provides a means for identifying lots of wafers that are processed in single wafers from consecutively input lots. The lot number is received from the transport control unit that transports the wafer to the unit, and at the time the lot number is received, a control number, which is a lot management code, is issued corresponding to the lot number, and subsequent control is performed for each wafer position. Based on the control number of the wafer that we currently have, we extract and execute the conditions necessary for processing. When the wafer is moved, the control number is passed to the next control unit accordingly. Lots can be easily identified by comparing control numbers.

Examples of F invention] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing a circular configuration of a wafer processing apparatus according to the present invention. In the figure, 10 indicates processing S! The system controller 20, 30 and 40 are independent in terms of control structure, and are control units that perform predetermined wafer processing. 50 is the system controller 1
0 and each of the control units 20, 30 and 40, and between the control units.

FIG. 2 is a circuit diagram showing a specific configuration of a portion of the control units 20, 30 and 40 that performs control number transfer and storage section (2). In Figure 2,
Reference numerals 21 to 28, 31 to 38 and 41 to 48 are control number storage units for storing control numbers, which are lot identification codes of wafers being processed or before being processed in the control units 20, 30 and 40, respectively; .61 to 68 and 71 to 78 are data lines for transmitting the control numbers between each control unit 20, 30 and 40, and 81 to 83 are control signals through which control signals for updating the control numbers are transmitted. It's a line.

In an apparatus having such a configuration, there are various methods of loading a lot, but in this embodiment, the lot is automatically conveyed to the entrance of the apparatus by an automatic conveyance system (not shown).

The transport control side stores the lot number of the transported lot, and when the lot is transferred to the apparatus, it sends the lot number to the control unit 20 which performs the processing first. Control unit 20 sends this lot number to system controller 10 via communication network 50 . When the system controller 10 receives the lot number from the control unit 20, it issues a corresponding control number and sends this control number to the control unit 20 again via the communication network 50. At the same time, the system controller 10 sends information on various conditions necessary for processing in the control units 1-20 to the control unit 20. The control unit 20 then executes a predetermined process based on the sent conditions. When the execution of the process in this control unit 20 is completed, the wafer is sent to the next control unit 30 by an automatic transfer system (not shown).

At the same time, the control unit 20
A control number corresponding to the transported wafer is sent to the wafer.

The control unit 30 uses the control number to determine whether the received wafer is the same lot as the wafer processed immediately before, and if it is the same lot, it executes a predetermined process based on the currently stored conditions. On the other hand, if the lots are not the same, a control number is sent to the system controller 10. In this case, the system controller 10 sends the lot number conditions corresponding to this control number to the control unit 30. The control unit 30 then executes a predetermined process based on the received conditions.

When the execution of the process in the control unit 30 is completed, the wafer is sent to the next control unit 40, and at the same time, a control number corresponding to the transferred wafer is sent to the control unit 40.

Thereafter, the control unit 40 performs lot identification and processes the sent wafers in the same manner as described above.

Next, a method of updating the control number will be explained using FIG. First, when the control unit 20 receives a lot number from the transport control side, it receives the control number as described above and puts it on the data lines 51 to 58. When the control unit 20 receives the wafer, it generates a control signal for updating the control number, and puts this control signal on the control signal line 81. Based on this control signal, the control numbers carried on the data lines 51 to 58 are stored in the control number storage units 21 to 2B. control unit 20
Upon completion of the process in , the control unit 20 generates a control signal and puts it on the signal line 81 . Based on this control signal, the data stored in the control number storage sections 21 to 28 are loaded onto the data lines 61 to 68.

Next, the control unit 30 receives the wafer and sends a control signal for updating the control number.

This control signal is placed on the control signal line 82. Based on this control signal, the control numbers previously placed on the data lines 61 to 68 are stored in the control number storage sections 31 to 38. below,
Similarly, control numbers for lot identification are sequentially delivered.

As described above, according to the apparatus of the above embodiment, it is possible to accurately identify the wafer lots necessary for processing consecutive lots, and it is possible to construct a control system with no limit to the number of wafers in a lot. In addition, it is advantageous in terms of equipment space and cost, which were problems when using an Evermark reader, etc., and leads to a significant improvement in the yield of wafer processing. In short, it is possible to realize a wafer processing apparatus that is compatible with future unmanned systems.

[Effects of the Invention] As explained above, according to the present invention, a 1fft wafer process process is provided which can accurately identify a lot in wafer processing, and which can save space and reduce the cost of the apparatus. can do.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing a schematic configuration of a wafer processing apparatus according to the present invention, and FIG. 2 is a circuit diagram showing a specific configuration of a portion of the apparatus. 10... System controller Ushikan mother, 20.30.
40... Control unit, 50... Communication network, 21-28° 31-38.41-48... Control number storage section, 51-58.61-68.71-
78...Data lines 481-83...Control signal line. Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 2

Claims (1)

[Claims] In a wafer processing apparatus that is configured of a plurality of control units that are independent in terms of control structure and performs single wafer processing, means for issuing a control number that is a continuous management code corresponding to a lot when receiving a lot of wafers; A means for storing the control number for each wafer processing or storage position, and a means for transferring the control number between the wafer processing or storage positions as the wafer is moved; Continuous wafers moving between control units are identified by the control number above,
A wafer processing apparatus characterized in that each control unit is configured to perform processing corresponding to each lot.