JPS62137720A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS62137720A
JPS62137720A JP27613785A JP27613785A JPS62137720A JP S62137720 A JPS62137720 A JP S62137720A JP 27613785 A JP27613785 A JP 27613785A JP 27613785 A JP27613785 A JP 27613785A JP S62137720 A JPS62137720 A JP S62137720A
Authority
JP
Japan
Prior art keywords
coercive force
thickness
magnetic
chromium
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27613785A
Other languages
Japanese (ja)
Inventor
Masami Yamashita
正己 山下
Akira Nitta
新田 彰
Noboru Iwato
岩戸 昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP27613785A priority Critical patent/JPS62137720A/en
Publication of JPS62137720A publication Critical patent/JPS62137720A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To securely stick a magnetic material to a substrate and to remarkably improve the coercive force of the magnetic material by using a chromium film as an underlying layer. CONSTITUTION:The underlying layer essentially consisting of chromium is provided on the substrate and the magnetic layer consisting of a cobalt-platinum alloy is provided on the underlying layer. The thickness of the underlying layer consisting of the chromium film is preferably in a 10-10,000Angstrom range. The effect of improving the coercive force is low and the ratio of the fluctuation of the coercive force to the change of the thickness is high if the thickness is <=10Angstrom . The magnetic recording medium having the stable coercive force is then not obtainable. The coercive force is substantially high and the fluctuation of the coercive force as compared to the change of the thickness is relatively small if the thickness of the chromium layer is within the 100-10,000Angstrom range and therefore, said range is more particularly preferable in general. There is no particular improvement of the coercive force if the chromium layer is made thicker than the specified range. In addition, such is uneconomical.

Description

【発明の詳細な説明】 (座業上の利用分野) 不発明は磁気ディスク、磁気−ラム、磁気テープなど磁
気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Sedentary Use) The invention relates to magnetic recording media such as magnetic disks, magnetic rams, and magnetic tapes.

(従来の技術) 近年、磁気記録媒体における記録密度の高密度体の#望
が強(、これにともない全属膳峰蒲耀を磁性層とする連
a薄膜形の媒体が注目されている。
(Prior Art) In recent years, there has been a strong desire for high-density recording media in magnetic recording media, and as a result, multi-layer thin film media in which a magnetic layer is a magnetic layer have been attracting attention.

このような連読薄模形の磁気記録媒体としてはコバルト
バリン系、コバルト・ニッケル・リン系等の合金からな
るものが知られている。
As such continuous reading thin model magnetic recording media, those made of alloys such as cobalt-valine and cobalt-nickel-phosphorus are known.

また、より−ノーの高密度化を計る方法として光磁気記
録や垂直磁気記録等の新しい高密度情報信号記録方式が
提案され研究されている。一方従来の長手記録(面内記
録)方式は、記録方式としては十分な工業的実績があり
、この方式での記録密度の向上は、工業的に啄めて意義
のあることである。
In addition, new high-density information signal recording methods such as magneto-optical recording and perpendicular magnetic recording have been proposed and researched as a method for achieving even higher density. On the other hand, the conventional longitudinal recording (in-plane recording) method has a sufficient industrial track record as a recording method, and the improvement in recording density with this method is of great industrial significance.

最近、高密度化の要望に応じるために磁気へッVの浮上
鎗をより小さく、磁気へツーを媒体にほとんど接触させ
て記録・再生を行z5技術の検討が進められている。こ
のように接触形の磁気ヘッドを用いる場合には磁性薄J
漠の抗磁力全高めることによってより一層記ijk#i
t向上させることができることが知られている。
Recently, in order to meet the demand for higher density, studies are underway on the Z5 technology, in which the floating spear of the magnetic head V is made smaller and recording/reproduction is performed with the magnetic head V almost in contact with the medium. When using a contact type magnetic head like this, a magnetic thin J
By increasing the total coercive force of the
It is known that t can be improved.

従来真空波#を用いた隔抗磁カ金属薄膜を得る為の手法
として、■磁性材、#4の合金祁膚、(罰銅碑材料の熱
処理、■斜費蒸着法および■下地材料による制御、によ
る方法が提案されている。
Conventional methods for obtaining a magnetically antimagnetic metal thin film using vacuum waves include: - magnetic material, #4 alloy abrasion, (heat treatment of bronze monument material), - tilted vapor deposition method, and - control by base material. , a method has been proposed.

しかしながら、前記のようなコバルト・リン系、コバル
ト・ニッケル系などの合金は膜厚1oooi程度で比較
した場合、抗磁力は300〜1000工ルステツV程度
にすぎないものである。
However, when comparing the above-mentioned cobalt-phosphorous alloys, cobalt-nickel alloys, etc. at a film thickness of about 100 mm, the coercive force is only about 300 to 1000 F.V.

比・収約に高抗磁力の合金として、コバルト・白金合金
が知られているが、これでも1000エルステツド程度
が限度であり、まだ満足できる抗磁力ではない上に、こ
の合金はニッケル・リン等の下地層との密着力が不充分
であるという欠点がある。また、バナジウム・白金・コ
バルト合金またはタングステン・白金・コバルト合金を
用いる方法(特開昭59−88807号公報)、白金・
コバルト・ゾラセオジム合金を用いる方法(特開昭59
−227106号公報)など3元合金をスパッタ法で基
体に付着させる方法が知られている。
Cobalt-platinum alloy is known as an alloy with high coercive force in terms of specificity and convergence, but even this is limited to about 1000 oersted, which is still not a satisfactory coercive force. The disadvantage is that the adhesion to the underlying layer is insufficient. Additionally, a method using a vanadium-platinum-cobalt alloy or a tungsten-platinum-cobalt alloy (Japanese Unexamined Patent Publication No. 1988-88807), a method using a vanadium-platinum-cobalt alloy,
Method using cobalt-zoraceodymium alloy (JP-A-59
A method is known in which a ternary alloy such as Japanese Patent No. 227106 is attached to a substrate by sputtering.

(発明が解決すべき問題点) これらの方法によれば抗磁力は最高1300エルステツ
ドに達する磁性薄膜が得られるが、6元合金のスパッタ
は、組成の制御に注意を払わねばならず、わずかの組成
の誤差により抗磁力が大きく変動しやすい。
(Problems to be Solved by the Invention) According to these methods, a magnetic thin film with a coercive force of up to 1300 oersted can be obtained, but when sputtering a six-element alloy, care must be taken to control the composition, and a slight Coercive force tends to fluctuate greatly due to errors in composition.

本発明は4単な組成の合金で安定して1砺い抗磁力を有
する通気記録4本を提供することを目的とする。
It is an object of the present invention to provide four aeration records that are made of an alloy with a simple composition and stably have a strong coercive force.

(問題点を解決するための手段) 本発明者らはコバルト・白金合金からなる磁性体の下地
処理法について1重々検討していたところ、下地、Ii
としてクロム膜を用いることによって、上記磁性体が強
固に付着する上に、磁性体の抗磁力がいちじるしく大き
くなることを見出した。本発明の磁気記録媒体は上記の
知見に基づくものである。すなわち、本発明は基体上に
クロムを主成分とする下地層を設げ、該下地層の上にコ
バルト・白金合金からなる磁性、*を設けることを特徴
とするものでるる。
(Means for Solving the Problems) The present inventors have been thoroughly considering a method for treating the base of a magnetic material made of a cobalt-platinum alloy, and found that the base, Ii
It has been found that by using a chromium film as a chromium film, not only the above-mentioned magnetic substance is firmly attached, but also the coercive force of the magnetic substance is significantly increased. The magnetic recording medium of the present invention is based on the above findings. That is, the present invention is characterized in that a base layer containing chromium as a main component is provided on a substrate, and a magnetic material made of a cobalt-platinum alloy is provided on the base layer.

以下、本発明について詳細に説明する。本発明の基体は
アルミニウム板、ガラス板、合成樹、信などの硬買成形
体またはアルミニウム箔、ポリエステルフイ平ムなど軟
質フィルムである。基体表面は常法により熱矯正および
研摩を行なって、うねりおよび凹凸を十分に小さくして
おく必要がある。
The present invention will be explained in detail below. The substrate of the present invention is a hard molded product such as an aluminum plate, a glass plate, a synthetic tree, or a plastic material, or a soft film such as an aluminum foil or a polyester film. The surface of the substrate must be thermally straightened and polished by conventional methods to sufficiently reduce waviness and unevenness.

下地層のクロムの付着はメッキ法またはスパッタ法のい
ずれの方法によってもよいが、その厚さが特に重要であ
る。クロム膜からなる下地層の厚さは10^〜1ooo
o^の範囲が望ましい。
The chromium of the underlayer may be deposited by either plating or sputtering, but its thickness is particularly important. The thickness of the base layer made of chromium film is 10^~1ooo
A range of o^ is desirable.

10又以下では抗磁力向上の効果が小さく、また、厚さ
の変化に対する抗磁力の変動の割合が大きく、安定した
抗磁力を有する磁気記録媒体が得られない。
If it is less than 10, the effect of improving coercive force is small, and the rate of change in coercive force with respect to change in thickness is large, making it impossible to obtain a magnetic recording medium with stable coercive force.

クロム層の厚さが100λ〜1ooooAの範囲では抗
磁力が充分に高く、シかも、厚さの変化に対する抗磁力
の変・助が比較的に小さいので、一般にはこの範囲がと
くに好ましい。これ以上クロム層を厚くしても抗磁力は
とくに上昇することはなく、不、経済である。
When the thickness of the chromium layer is in the range of 100λ to 1oooooA, the coercive force is sufficiently high, and the change in coercive force due to changes in thickness is relatively small, so this range is generally particularly preferred. Even if the chromium layer is made thicker than this, the coercive force does not particularly increase, and this is uneconomical.

本発明におけるコバルト・白金合金からなる磁性層はス
パッタ法により付着させる。コバルト・11 Δ /r
1 va  c−*  I++ If  l 口シ −
1%  −1+J  Il、  L  J?  7  
n −−n  ○ d白金2〜30%が好ましい。本発
明者らの実験結果によればコバルト・白金からなる磁性
層の抗磁力は原子比でコバルトが80%付近で最も高く
なり、コバルトがそれより多くなっても少なくなっても
抗磁力は低下する傾向にあった。前記組成の範囲を外れ
ると抗磁力が小さくなり過ぎて好ましくない。
The magnetic layer made of a cobalt-platinum alloy in the present invention is deposited by sputtering. Cobalt 11 Δ /r
1 va c-* I++ If l mouth-
1% -1+J Il, L J? 7
n -- n ○ d 2 to 30% platinum is preferred. According to the experimental results of the present inventors, the coercive force of a magnetic layer made of cobalt and platinum is highest when the atomic ratio of cobalt is around 80%, and the coercive force decreases even if the cobalt content is higher or lower than that. There was a tendency to If the composition is outside the above range, the coercive force becomes too small, which is not preferable.

(実施例) 以下、実施例および比較例により本発明を具体的に説明
する。
(Example) Hereinafter, the present invention will be specifically explained with reference to Examples and Comparative Examples.

実施例 基体として外径90、n五、肉条25.8m、厚さ1.
2msのアルミニウム円盤を準備した。基体表面をラッ
ピングした後、無心解メッキ法でニッケル・リンからな
る厚さ30μの硬質層を設けた。硬質層を鏡面ポリッシ
ングした後、基体をマグネトロンスパッタ装置(徳田A
作所製CFS −sES杉)の試料置台に固定した。マ
グネ)oンスパッタ装fを作動させ、アルゴンガス圧力
2 X 10−2torr 。
The example substrate has an outer diameter of 90 mm, a thickness of 25.8 m, and a thickness of 1.5 m.
A 2 ms aluminum disk was prepared. After lapping the surface of the substrate, a hard layer of nickel and phosphorus with a thickness of 30 μm was provided by a non-core plating method. After mirror polishing the hard layer, the substrate was sputtered using a magnetron sputtering device (Tokuda A
It was fixed on a sample stand of CFS-sES Cedar manufactured by Seisakusho. Magnetoon sputtering equipment was activated, and the argon gas pressure was 2 x 10-2 torr.

スパッタ・パワー4 W、<y”、DCスパッタの条件
で金4クロムをターデッドとしてクロム膜を付着させた
。つぎに、アルゴンガス圧2 X 10−2torr 
A chromium film was deposited with gold 4 chromium as tarded under sputtering power of 4 W, <y" and DC sputtering conditions. Next, argon gas pressure was set to 2 x 10-2 torr.
.

スパッタ・パワー6 W /E、m2、RFスパッタの
条件で、コバルト・白金(原子比82:18)t−ター
デッドとしてコバルト・白金合金からなる厚さ1000
Xの膜を付着させ、磁気記録媒体とした。
Sputtering power 6 W/E, m2, RF sputtering conditions, cobalt-platinum (atomic ratio 82:18) t-tarded, cobalt-platinum alloy thickness 1000
A film of X was attached to form a magnetic recording medium.

上記磁気記録媒体の裏作をくり返し行ない、その場合に
、クロムのスパッタ時間を段階に変更することによって
クロム膜の厚さが10^からi ooo。
The thickness of the chromium film can be increased from 10^ to ioooo by repeating the above process for preparing the magnetic recording medium and changing the chromium sputtering time in stages.

又までi々の厚みを有する7枚の磁気記録媒体を製作し
た。
Seven magnetic recording media having different thicknesses were manufactured.

これらの磁気記録媒体について抗磁力を測定した。抗磁
力の測定は理研電子社製の振動試料形感力計(形式BH
V −55)を用い、外部磁界15にガウスで行なった
。表1は測定した抗磁力と下地7の横軸は対数目盛であ
る。このグラフからクロムの付着により抗磁力がいちじ
るしく上昇し、クロム層の厚さが5000人で抗磁力が
6500エルステツドに達し、これ以上のクロム層の厚
さでは抗磁力がほとんど上昇しないで安定になることが
わかる。
The coercive force of these magnetic recording media was measured. Coercive force was measured using a vibrating sample sensitometer (model BH) manufactured by Riken Denshi.
V-55) with a Gaussian external magnetic field of 15. In Table 1, the horizontal axis of measured coercive force and underlayer 7 is on a logarithmic scale. This graph shows that the coercive force increases markedly with the adhesion of chromium, and when the thickness of the chromium layer is 5000 oersted, the coercive force reaches 6500 oersteds, and when the chromium layer is thicker than this, the coercive force hardly increases and becomes stable. I understand that.

次に上記磁気記録媒体のうち、クロム層の厚さが50大
の媒体と100又の媒体について記録・再生の周波数%
性を測定した。この場合、磁気ヘッドはアモルファスメ
タルヘッド(リング型)金用い、相対速度10 m/s
ee 、  )ラック幅20μm化したものである。グ
ラフの横軸および縦軸とも対数目盛でおる。このグラフ
からクロム層の厚さが厚い方が周波数の高い領域での出
力の低下が小さく、周波数特性が優れており、したがっ
て高、;・度で記録・再生ができることが明らかである
Next, among the above magnetic recording media, the recording/reproducing frequency % for the medium with a chromium layer thickness of 50 thick and the medium with 100 thick chromium layers.
The sex was measured. In this case, the magnetic head is an amorphous metal head (ring type), and the relative speed is 10 m/s.
ee, ) The rack width is 20 μm. Both the horizontal and vertical axes of the graph are on a logarithmic scale. From this graph, it is clear that the thicker the chromium layer, the smaller the drop in output in the high frequency range, the better the frequency characteristics, and therefore the higher the recording/reproduction capability.

辰6はこのようにして得られた磁気記録媒体の磁性層の
付着力を試、験した結果を示したものである。テープ剥
離テストとは媒体表面にナイフで1趨ピツチの基盤目を
縦横各10段(計100目)刻み、その上にセロハンテ
ープを張付けたのち引剥し、媒体表面の剥れた目数を調
べるテストでるり、スチル・ライフテストとは磁気ディ
スクをディスクドライブ装置にセットし、磁気ヘッドを
磁気ディスクの一定のトラックのみに固定して長時間磁
気ディスクを回転させ、そのトランクに島が入るかどう
かを調べることによって磁気層の耐久性を調べるもので
ある。
Figure 6 shows the results of testing the adhesion force of the magnetic layer of the magnetic recording medium thus obtained. What is the tape peel test? Use a knife to carve one pitch of base lines on the media surface, 10 rows in each direction (100 rows in total), apply cellophane tape on top of it, then peel it off and check the number of rows that have peeled off on the media surface. A still life test is a test in which a magnetic disk is set in a disk drive device, the magnetic head is fixed only on a certain track of the magnetic disk, and the magnetic disk is rotated for a long period of time to see if islands fit into the trunk. The durability of the magnetic layer is investigated by examining the .

表6に示す通り、クロム膜の下地層を有するものは磁性
層の付着が強固であった。
As shown in Table 6, the adhesion of the magnetic layer was strong in those having the chromium film underlayer.

表 1 表  2 表  3 比較例 スパッタ法によるクロム膜の付着を行なわなかった外は
実施列と同じ方法、同じ条件で磁気記録を設けたものに
比べ、周波数の高い領域での出力の低下がいちじるしか
った。また、この媒体の磁性層の付層力を試験した結果
は表6に示す通り、実施列に比べ付着力は弱いと判断さ
れた。
Table 1 Table 2 Table 3 Comparative Example Compared to the example in which magnetic recording was performed using the same method and under the same conditions as in the practical example, except that the chromium film was not deposited by sputtering, the output in the high frequency range was significantly reduced. It was tough. Further, as shown in Table 6, the results of testing the adhesion force of the magnetic layer of this medium were determined to be weaker than in the practical example.

(発明の効果) 本発明によれば抗磁力が高くて、周波数特性に優れ、か
つ、磁性層の耐久性が高い磁気記録媒体が得られる。
(Effects of the Invention) According to the present invention, a magnetic recording medium having high coercive force, excellent frequency characteristics, and high durability of the magnetic layer can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は下地クロム層の厚さと抗磁力の関係を示すグラ
フ、第2図は周波数特性を表わすグラフである。 特許出願人 電気化学工業株式会社 第1図 下肥70ム層の厚ざ(人) 第2図 VL 殊el 炭k (/’I f”fZ )手  続
  補  正  書 昭和61年3月28日 特許庁長官  宇 賀 道 部 殿 1、事件の表示 昭和30年特許願第276137号 2、発明の名称 磁気記録媒体 3、補正をする者 事件との関係   特許出願人 住所 ■100 東京都千代田区有楽町1丁目4番1号
明細書の発明の詳細な説明の欄 5、補正の内容
FIG. 1 is a graph showing the relationship between the thickness of the underlying chromium layer and coercive force, and FIG. 2 is a graph showing frequency characteristics. Patent Applicant Denki Kagaku Kogyo Co., Ltd. Figure 1 Thickness of 70 μm layer of bottom manure (people) Figure 2 Commissioner of the Japan Patent Office Michibe Uga1, Indication of the case Patent Application No. 276137 of 19552, Name of the invention Magnetic recording medium3, Person making the amendment Relationship to the case Patent applicant address ■100 Yurakucho, Chiyoda-ku, Tokyo Column 5 of Detailed Description of the Invention in Specification No. 1-4-1, Contents of Amendment

Claims (3)

【特許請求の範囲】[Claims] (1)基体上にクロムを主成分とする下地層を設け、該
下地層の上にコバルト・白金合金からなる磁性層を設け
ることを特徴とする磁気記録媒体。
(1) A magnetic recording medium characterized in that an underlayer containing chromium as a main component is provided on a substrate, and a magnetic layer made of a cobalt-platinum alloy is provided on the underlayer.
(2)下地層が10Å以上の厚さである特許請求の範囲
第(1)項記載の磁気記録媒体。
(2) The magnetic recording medium according to claim (1), wherein the underlayer has a thickness of 10 Å or more.
(3)コバルト・白金合金がコバルト70〜98%、白
金2〜30%(原子比)の組成であり、かつ、磁性層の
厚さが300Å〜5000Åである特許請求の範囲第1
項記載の磁気記録媒体。
(3) Claim 1, wherein the cobalt-platinum alloy has a composition of 70 to 98% cobalt and 2 to 30% platinum (atomic ratio), and the thickness of the magnetic layer is 300 Å to 5000 Å.
Magnetic recording medium described in Section 1.
JP27613785A 1985-12-10 1985-12-10 Magnetic recording medium Pending JPS62137720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27613785A JPS62137720A (en) 1985-12-10 1985-12-10 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27613785A JPS62137720A (en) 1985-12-10 1985-12-10 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS62137720A true JPS62137720A (en) 1987-06-20

Family

ID=17565292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27613785A Pending JPS62137720A (en) 1985-12-10 1985-12-10 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS62137720A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01256017A (en) * 1988-04-04 1989-10-12 Victor Co Of Japan Ltd Magnetic recording medium
US6335103B1 (en) * 1988-08-10 2002-01-01 Hitachi, Ltd. Magnetic recording media for longitudinal recording
US6627253B2 (en) 1988-08-10 2003-09-30 Hitachi, Ltd. Magnetic recording media for longitudinal recording, process for producing the same and magnetic memory apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200513A (en) * 1982-05-18 1983-11-22 Nec Corp Magnetic memory medium
JPS59142738A (en) * 1983-02-02 1984-08-16 Nec Corp Magnetic recording medium
JPS60111323A (en) * 1983-11-03 1985-06-17 Yokogawa Hewlett Packard Ltd Magnetic recording medium
JPS61142524A (en) * 1984-12-13 1986-06-30 Hitachi Metals Ltd Magnetic recording medium
JPS61292219A (en) * 1985-06-19 1986-12-23 Sony Corp Magnetic recording medium

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
JPS58200513A (en) * 1982-05-18 1983-11-22 Nec Corp Magnetic memory medium
JPS59142738A (en) * 1983-02-02 1984-08-16 Nec Corp Magnetic recording medium
JPS60111323A (en) * 1983-11-03 1985-06-17 Yokogawa Hewlett Packard Ltd Magnetic recording medium
JPS61142524A (en) * 1984-12-13 1986-06-30 Hitachi Metals Ltd Magnetic recording medium
JPS61292219A (en) * 1985-06-19 1986-12-23 Sony Corp Magnetic recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01256017A (en) * 1988-04-04 1989-10-12 Victor Co Of Japan Ltd Magnetic recording medium
US6335103B1 (en) * 1988-08-10 2002-01-01 Hitachi, Ltd. Magnetic recording media for longitudinal recording
US6627253B2 (en) 1988-08-10 2003-09-30 Hitachi, Ltd. Magnetic recording media for longitudinal recording, process for producing the same and magnetic memory apparatus

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