JPS62135431U - - Google Patents
Info
- Publication number
- JPS62135431U JPS62135431U JP2394786U JP2394786U JPS62135431U JP S62135431 U JPS62135431 U JP S62135431U JP 2394786 U JP2394786 U JP 2394786U JP 2394786 U JP2394786 U JP 2394786U JP S62135431 U JPS62135431 U JP S62135431U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode plate
- cylindrical body
- gas
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Description
第１図は本考案の一実施例の部分断面図、第２
図は本考案の一実施例の全体を示す断面図、第３
図は従来例を説明するための図である。
１：容器、２：排気穴、３：陽極、４：陰極、
５：試料、６：高周波電源、７：絶縁チユーブ、
８：流量調整弁、９：絶縁物、１１：筒体、１３
，１４：電極棒、１５，１６：鍔部、１７，１８
：コネクタ、１９ａ、１９ｂ，２０ａ，２０ｂ：
穴、２１，２２：パイプ、２３，２４：金属シー
ル部材、２７，２８：Ｏリングパツキング。
Fig. 1 is a partial sectional view of one embodiment of the present invention;
The figure is a sectional view showing the whole of one embodiment of the present invention.
The figure is a diagram for explaining a conventional example. 1: Container, 2: Exhaust hole, 3: Anode, 4: Cathode,
5: Sample, 6: High frequency power supply, 7: Insulating tube,
8: Flow rate adjustment valve, 9: Insulator, 11: Cylindrical body, 13
, 14: Electrode rod, 15, 16: Flange, 17, 18
: Connector, 19a, 19b, 20a, 20b:
Hole, 21, 22: Pipe, 23, 24: Metal seal member, 27, 28: O-ring packing.
Claims (1)
、第１の電極板を接地し、第２の電極板に高周波
電圧または直流電圧を印加すると共に、第２の電
極板の第１の電極板との対向面に設けたガス供給
口を介して両電極板間にガスを供給することによ
りプラズマを発生させるように構成した装置にお
いて、前記ガス供給口へガスを供給するため該供
給口に一端が接続される導電性のパイプと、該パ
イプの他端に接続される絶縁性筒体と、該筒体内
部に対向配置される一対の電極棒とを設け、前記
ガスが筒体の内壁と各電極棒との隙間を流れるよ
うになすと共に、前記２つの電極棒のうちパイプ
側の電極棒を該パイプと電気的に接続し、また他
方の電極棒を接地し、かつ前記２つの電極棒との
間隔及び前記筒体と各電極棒の隙間をイオンシー
ス距離以下に設定したことを特徴とするプラズマ
装置。 A first electrode plate and a second electrode plate are arranged facing each other in a sealed container, the first electrode plate is grounded, a high frequency voltage or a DC voltage is applied to the second electrode plate, and the first electrode plate of the second electrode plate is grounded. In an apparatus configured to generate plasma by supplying gas between both electrode plates through a gas supply port provided on a surface facing the electrode plate, the gas supply port is used to supply gas to the gas supply port. A conductive pipe having one end connected to the mouth, an insulating cylindrical body connected to the other end of the pipe, and a pair of electrode rods facing each other inside the cylindrical body are provided, and the gas is connected to the cylindrical body. The electrode rod on the pipe side of the two electrode rods is electrically connected to the pipe, and the other electrode rod is grounded. 1. A plasma device characterized in that a gap between two electrode rods and a gap between the cylindrical body and each electrode rod are set to be equal to or less than an ion sheath distance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2394786U JPS62135431U (en) | 1986-02-21 | 1986-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2394786U JPS62135431U (en) | 1986-02-21 | 1986-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62135431U true JPS62135431U (en) | 1987-08-26 |
Family
ID=30822726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2394786U Pending JPS62135431U (en) | 1986-02-21 | 1986-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62135431U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8895506B2 (en) | 2006-12-14 | 2014-11-25 | DePuy Synthes Products, LLC | Protein stabilization formulations |
-
1986
- 1986-02-21 JP JP2394786U patent/JPS62135431U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8895506B2 (en) | 2006-12-14 | 2014-11-25 | DePuy Synthes Products, LLC | Protein stabilization formulations |
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