JPS62133551U - - Google Patents
Info
- Publication number
- JPS62133551U JPS62133551U JP1948986U JP1948986U JPS62133551U JP S62133551 U JPS62133551 U JP S62133551U JP 1948986 U JP1948986 U JP 1948986U JP 1948986 U JP1948986 U JP 1948986U JP S62133551 U JPS62133551 U JP S62133551U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transport path
- transported
- guide member
- tapered wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Feeding Of Articles To Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1948986U JPH0530022Y2 (cs) | 1986-02-15 | 1986-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1948986U JPH0530022Y2 (cs) | 1986-02-15 | 1986-02-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62133551U true JPS62133551U (cs) | 1987-08-22 |
| JPH0530022Y2 JPH0530022Y2 (cs) | 1993-07-30 |
Family
ID=30814129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1948986U Expired - Lifetime JPH0530022Y2 (cs) | 1986-02-15 | 1986-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530022Y2 (cs) |
-
1986
- 1986-02-15 JP JP1948986U patent/JPH0530022Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530022Y2 (cs) | 1993-07-30 |