JPH01116444U - - Google Patents
Info
- Publication number
- JPH01116444U JPH01116444U JP1247988U JP1247988U JPH01116444U JP H01116444 U JPH01116444 U JP H01116444U JP 1247988 U JP1247988 U JP 1247988U JP 1247988 U JP1247988 U JP 1247988U JP H01116444 U JPH01116444 U JP H01116444U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- end portion
- semiconductor processing
- semiconductor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247988U JPH01116444U (cs) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1247988U JPH01116444U (cs) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116444U true JPH01116444U (cs) | 1989-08-07 |
Family
ID=31221952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1247988U Pending JPH01116444U (cs) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116444U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117610A (ja) * | 1983-11-30 | 1985-06-25 | Kakizaki Seisakusho:Kk | ウエハ用バスケット |
-
1988
- 1988-02-01 JP JP1247988U patent/JPH01116444U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60117610A (ja) * | 1983-11-30 | 1985-06-25 | Kakizaki Seisakusho:Kk | ウエハ用バスケット |