JPS62132452U - - Google Patents
Info
- Publication number
- JPS62132452U JPS62132452U JP2036386U JP2036386U JPS62132452U JP S62132452 U JPS62132452 U JP S62132452U JP 2036386 U JP2036386 U JP 2036386U JP 2036386 U JP2036386 U JP 2036386U JP S62132452 U JPS62132452 U JP S62132452U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensor
- chamber
- electrical equipment
- suction pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 3
- 229920005597 polymer membrane Polymers 0.000 claims description 2
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2036386U JPS62132452U (enExample) | 1986-02-14 | 1986-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2036386U JPS62132452U (enExample) | 1986-02-14 | 1986-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62132452U true JPS62132452U (enExample) | 1987-08-21 |
Family
ID=30815803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2036386U Pending JPS62132452U (enExample) | 1986-02-14 | 1986-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62132452U (enExample) |
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1986
- 1986-02-14 JP JP2036386U patent/JPS62132452U/ja active Pending