JPS62131432U - - Google Patents
Info
- Publication number
- JPS62131432U JPS62131432U JP1842786U JP1842786U JPS62131432U JP S62131432 U JPS62131432 U JP S62131432U JP 1842786 U JP1842786 U JP 1842786U JP 1842786 U JP1842786 U JP 1842786U JP S62131432 U JPS62131432 U JP S62131432U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- container
- exhaust port
- wafer
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000013459 approach Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1842786U JPS62131432U (no) | 1986-02-12 | 1986-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1842786U JPS62131432U (no) | 1986-02-12 | 1986-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62131432U true JPS62131432U (no) | 1987-08-19 |
Family
ID=30812094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1842786U Pending JPS62131432U (no) | 1986-02-12 | 1986-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62131432U (no) |
-
1986
- 1986-02-12 JP JP1842786U patent/JPS62131432U/ja active Pending