JPS62130860U - - Google Patents
Info
- Publication number
- JPS62130860U JPS62130860U JP1715386U JP1715386U JPS62130860U JP S62130860 U JPS62130860 U JP S62130860U JP 1715386 U JP1715386 U JP 1715386U JP 1715386 U JP1715386 U JP 1715386U JP S62130860 U JPS62130860 U JP S62130860U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- polishing surface
- airtight chamber
- pressure roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の概略を示す斜視図、第２図は
本考案の動作を示す説明図である。第３図は研摩
装置の一実施例を示す正面図、第４図は第３図に
おける―線に沿う断面図である。第５図は従
来例を示す概略図、第６図は従来例の動作を示す
説明図である。
１…ラツピングフイルム、４…研摩面、５…被
加工物、６…押圧ロール、７…弾性中空キヤツプ
、１９…気密室、２２…加圧手段。
FIG. 1 is a perspective view showing an outline of the present invention, and FIG. 2 is an explanatory view showing the operation of the present invention. FIG. 3 is a front view showing one embodiment of the polishing device, and FIG. 4 is a sectional view taken along the line - in FIG. FIG. 5 is a schematic diagram showing a conventional example, and FIG. 6 is an explanatory diagram showing the operation of the conventional example. DESCRIPTION OF SYMBOLS 1... Wrapping film, 4... Polished surface, 5... Workpiece, 6... Press roll, 7... Elastic hollow cap, 19... Airtight chamber, 22... Pressurizing means.
Claims (1)
可能に配設するとともに、研摩面の裏側に接触す
るように設けた押圧ロールにて、研摩面を被加工
物に向け押圧する研摩装置において、上記押圧ロ
ールの周面に複数個の弾性膜突起部により構成さ
れる気密室を設けるとともに、該気密室の内部に
圧力流体を導入あるいは封入可能とした研摩装置
。 In a polishing device in which a workpiece is placed in sliding contact with the polishing surface of a wrapping film, and the polishing surface is pressed toward the workpiece using a pressure roll provided in contact with the back side of the polishing surface, A polishing device in which an airtight chamber formed by a plurality of elastic membrane protrusions is provided on the circumferential surface of the pressure roll, and a pressurized fluid can be introduced or sealed into the airtight chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715386U JPS62130860U (en) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715386U JPS62130860U (en) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62130860U true JPS62130860U (en) | 1987-08-18 |
Family
ID=30809654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1715386U Pending JPS62130860U (en) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282859A (en) * | 1986-05-29 | 1987-12-08 | Toho Denshi Kogyo Kk | Magnetic head polishing method and device |
| JP2011161534A (en) * | 2010-02-05 | 2011-08-25 | V Technology Co Ltd | Abrasive head and abrading device |
-
1986
- 1986-02-07 JP JP1715386U patent/JPS62130860U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282859A (en) * | 1986-05-29 | 1987-12-08 | Toho Denshi Kogyo Kk | Magnetic head polishing method and device |
| JP2011161534A (en) * | 2010-02-05 | 2011-08-25 | V Technology Co Ltd | Abrasive head and abrading device |