JPS62130860U - - Google Patents
Info
- Publication number
- JPS62130860U JPS62130860U JP1715386U JP1715386U JPS62130860U JP S62130860 U JPS62130860 U JP S62130860U JP 1715386 U JP1715386 U JP 1715386U JP 1715386 U JP1715386 U JP 1715386U JP S62130860 U JPS62130860 U JP S62130860U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- polishing surface
- airtight chamber
- pressure roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715386U JPS62130860U (OSRAM) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715386U JPS62130860U (OSRAM) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62130860U true JPS62130860U (OSRAM) | 1987-08-18 |
Family
ID=30809654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1715386U Pending JPS62130860U (OSRAM) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130860U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282859A (ja) * | 1986-05-29 | 1987-12-08 | Toho Denshi Kogyo Kk | 磁気ヘツド研摩方法および装置 |
| JP2011161534A (ja) * | 2010-02-05 | 2011-08-25 | V Technology Co Ltd | 研磨ヘッド及び研磨装置 |
-
1986
- 1986-02-07 JP JP1715386U patent/JPS62130860U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282859A (ja) * | 1986-05-29 | 1987-12-08 | Toho Denshi Kogyo Kk | 磁気ヘツド研摩方法および装置 |
| JP2011161534A (ja) * | 2010-02-05 | 2011-08-25 | V Technology Co Ltd | 研磨ヘッド及び研磨装置 |