JPS62130331U - - Google Patents

Info

Publication number
JPS62130331U
JPS62130331U JP1716986U JP1716986U JPS62130331U JP S62130331 U JPS62130331 U JP S62130331U JP 1716986 U JP1716986 U JP 1716986U JP 1716986 U JP1716986 U JP 1716986U JP S62130331 U JPS62130331 U JP S62130331U
Authority
JP
Japan
Prior art keywords
air
room
air conditioner
clean room
hepa filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1716986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410504Y2 (US06521211-20030218-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986017169U priority Critical patent/JPH0410504Y2/ja
Publication of JPS62130331U publication Critical patent/JPS62130331U/ja
Application granted granted Critical
Publication of JPH0410504Y2 publication Critical patent/JPH0410504Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1986017169U 1986-02-08 1986-02-08 Expired JPH0410504Y2 (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (US06521211-20030218-C00004.png) 1986-02-08 1986-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986017169U JPH0410504Y2 (US06521211-20030218-C00004.png) 1986-02-08 1986-02-08

Publications (2)

Publication Number Publication Date
JPS62130331U true JPS62130331U (US06521211-20030218-C00004.png) 1987-08-18
JPH0410504Y2 JPH0410504Y2 (US06521211-20030218-C00004.png) 1992-03-16

Family

ID=30809681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986017169U Expired JPH0410504Y2 (US06521211-20030218-C00004.png) 1986-02-08 1986-02-08

Country Status (1)

Country Link
JP (1) JPH0410504Y2 (US06521211-20030218-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100439U (US06521211-20030218-C00004.png) * 1985-08-20 1987-06-26
JPH0225651A (ja) * 1988-07-14 1990-01-29 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148525U (ja) * 1982-03-30 1983-10-05 株式会社大林組 超清浄空気室構造
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148525U (ja) * 1982-03-30 1983-10-05 株式会社大林組 超清浄空気室構造
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100439U (US06521211-20030218-C00004.png) * 1985-08-20 1987-06-26
JPH0225651A (ja) * 1988-07-14 1990-01-29 Hitachi Plant Eng & Constr Co Ltd クリーンルーム

Also Published As

Publication number Publication date
JPH0410504Y2 (US06521211-20030218-C00004.png) 1992-03-16

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