JPS6213020U - - Google Patents
Info
- Publication number
- JPS6213020U JPS6213020U JP10329385U JP10329385U JPS6213020U JP S6213020 U JPS6213020 U JP S6213020U JP 10329385 U JP10329385 U JP 10329385U JP 10329385 U JP10329385 U JP 10329385U JP S6213020 U JPS6213020 U JP S6213020U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric thin
- acoustic wave
- surface acoustic
- uneven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 11
- 238000010897 surface acoustic wave method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 4
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329385U JPS6213020U (cs) | 1985-07-05 | 1985-07-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10329385U JPS6213020U (cs) | 1985-07-05 | 1985-07-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6213020U true JPS6213020U (cs) | 1987-01-26 |
Family
ID=30975714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10329385U Pending JPS6213020U (cs) | 1985-07-05 | 1985-07-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213020U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015001900A1 (ja) * | 2013-07-02 | 2015-01-08 | 日本碍子株式会社 | 弾性波デバイス |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182312A (ja) * | 1982-04-20 | 1983-10-25 | Toshiba Corp | 弾性表面波装置 |
-
1985
- 1985-07-05 JP JP10329385U patent/JPS6213020U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58182312A (ja) * | 1982-04-20 | 1983-10-25 | Toshiba Corp | 弾性表面波装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015001900A1 (ja) * | 2013-07-02 | 2015-01-08 | 日本碍子株式会社 | 弾性波デバイス |
| US10230349B2 (en) | 2013-07-02 | 2019-03-12 | Ngk Insulators, Ltd. | Acoustic wave device |