JPS62130163U - - Google Patents

Info

Publication number
JPS62130163U
JPS62130163U JP1986018410U JP1841086U JPS62130163U JP S62130163 U JPS62130163 U JP S62130163U JP 1986018410 U JP1986018410 U JP 1986018410U JP 1841086 U JP1841086 U JP 1841086U JP S62130163 U JPS62130163 U JP S62130163U
Authority
JP
Japan
Prior art keywords
combustion engine
internal combustion
canister
stepping motor
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986018410U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986018410U priority Critical patent/JPS62130163U/ja
Publication of JPS62130163U publication Critical patent/JPS62130163U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP1986018410U 1986-02-12 1986-02-12 Pending JPS62130163U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986018410U JPS62130163U (ru) 1986-02-12 1986-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986018410U JPS62130163U (ru) 1986-02-12 1986-02-12

Publications (1)

Publication Number Publication Date
JPS62130163U true JPS62130163U (ru) 1987-08-17

Family

ID=30812061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986018410U Pending JPS62130163U (ru) 1986-02-12 1986-02-12

Country Status (1)

Country Link
JP (1) JPS62130163U (ru)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0571655A (ja) 1991-09-10 1993-03-23 Tohoku Oki Denki Kk モータ駆動双方向弁とそのシール構造
JPH0932961A (ja) * 1995-07-18 1997-02-07 Hitachi Ltd ゲートバルブおよびそれを用いた半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0571655A (ja) 1991-09-10 1993-03-23 Tohoku Oki Denki Kk モータ駆動双方向弁とそのシール構造
JPH0932961A (ja) * 1995-07-18 1997-02-07 Hitachi Ltd ゲートバルブおよびそれを用いた半導体製造装置

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