JPS6212945U - - Google Patents

Info

Publication number
JPS6212945U
JPS6212945U JP4076886U JP4076886U JPS6212945U JP S6212945 U JPS6212945 U JP S6212945U JP 4076886 U JP4076886 U JP 4076886U JP 4076886 U JP4076886 U JP 4076886U JP S6212945 U JPS6212945 U JP S6212945U
Authority
JP
Japan
Prior art keywords
container
gas supply
serves
frequency power
parallel plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4076886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986040768U priority Critical patent/JPS6236280Y2/ja
Publication of JPS6212945U publication Critical patent/JPS6212945U/ja
Application granted granted Critical
Publication of JPS6236280Y2 publication Critical patent/JPS6236280Y2/ja
Expired legal-status Critical Current

Links

JP1986040768U 1986-03-20 1986-03-20 Expired JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986040768U JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986040768U JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-20 1986-03-20

Publications (2)

Publication Number Publication Date
JPS6212945U true JPS6212945U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-26
JPS6236280Y2 JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-16

Family

ID=30855146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986040768U Expired JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109714A (ja) * 1987-10-22 1989-04-26 Nec Corp 気相成長装置
JPH07130731A (ja) * 1993-10-29 1995-05-19 Nec Corp 半導体装置ならびにその製造方法および製造装置
JP2013159798A (ja) * 2012-02-02 2013-08-19 Mitsubishi Electric Corp プラズマｃｖｄ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4980975A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-12-08 1974-08-05
JPS5391665A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4980975A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-12-08 1974-08-05
JPS5391665A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109714A (ja) * 1987-10-22 1989-04-26 Nec Corp 気相成長装置
JPH07130731A (ja) * 1993-10-29 1995-05-19 Nec Corp 半導体装置ならびにその製造方法および製造装置
JP2013159798A (ja) * 2012-02-02 2013-08-19 Mitsubishi Electric Corp プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPS6236280Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-16

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