JPS62129058U - - Google Patents
Info
- Publication number
- JPS62129058U JPS62129058U JP1629786U JP1629786U JPS62129058U JP S62129058 U JPS62129058 U JP S62129058U JP 1629786 U JP1629786 U JP 1629786U JP 1629786 U JP1629786 U JP 1629786U JP S62129058 U JPS62129058 U JP S62129058U
- Authority
- JP
- Japan
- Prior art keywords
- sputtered
- target
- substrate ring
- substrate
- hitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1629786U JPS62129058U (me) | 1986-02-08 | 1986-02-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1629786U JPS62129058U (me) | 1986-02-08 | 1986-02-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62129058U true JPS62129058U (me) | 1987-08-15 |
Family
ID=30808026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1629786U Pending JPS62129058U (me) | 1986-02-08 | 1986-02-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62129058U (me) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52145380A (en) * | 1976-05-31 | 1977-12-03 | Hitachi Ltd | Sputtering apparatus |
-
1986
- 1986-02-08 JP JP1629786U patent/JPS62129058U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52145380A (en) * | 1976-05-31 | 1977-12-03 | Hitachi Ltd | Sputtering apparatus |