JPH0217550U - - Google Patents
Info
- Publication number
- JPH0217550U JPH0217550U JP9368388U JP9368388U JPH0217550U JP H0217550 U JPH0217550 U JP H0217550U JP 9368388 U JP9368388 U JP 9368388U JP 9368388 U JP9368388 U JP 9368388U JP H0217550 U JPH0217550 U JP H0217550U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- substrate
- vapor deposition
- substrate holder
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9368388U JPH0217550U (me) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9368388U JPH0217550U (me) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217550U true JPH0217550U (me) | 1990-02-05 |
Family
ID=31318151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9368388U Pending JPH0217550U (me) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217550U (me) |
-
1988
- 1988-07-15 JP JP9368388U patent/JPH0217550U/ja active Pending