JPS62128629U - - Google Patents

Info

Publication number
JPS62128629U
JPS62128629U JP1715986U JP1715986U JPS62128629U JP S62128629 U JPS62128629 U JP S62128629U JP 1715986 U JP1715986 U JP 1715986U JP 1715986 U JP1715986 U JP 1715986U JP S62128629 U JPS62128629 U JP S62128629U
Authority
JP
Japan
Prior art keywords
etched
sample
photon
reactive gas
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1715986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1715986U priority Critical patent/JPS62128629U/ja
Publication of JPS62128629U publication Critical patent/JPS62128629U/ja
Pending legal-status Critical Current

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Landscapes

  • Drying Of Semiconductors (AREA)
JP1715986U 1986-02-07 1986-02-07 Pending JPS62128629U (enFirst)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1715986U JPS62128629U (enFirst) 1986-02-07 1986-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1715986U JPS62128629U (enFirst) 1986-02-07 1986-02-07

Publications (1)

Publication Number Publication Date
JPS62128629U true JPS62128629U (enFirst) 1987-08-14

Family

ID=30809664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1715986U Pending JPS62128629U (enFirst) 1986-02-07 1986-02-07

Country Status (1)

Country Link
JP (1) JPS62128629U (enFirst)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02288332A (ja) * 1989-04-19 1990-11-28 Galram Technol Ind Ltd 半導体ウェーハからパターンが描かれた焼成後のフォトレジスト層を除去する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02288332A (ja) * 1989-04-19 1990-11-28 Galram Technol Ind Ltd 半導体ウェーハからパターンが描かれた焼成後のフォトレジスト層を除去する方法

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