JPS6212834U - - Google Patents

Info

Publication number

JPS6212834U

JPS6212834U JP10394885U JP10394885U JPS6212834U JP S6212834 U JPS6212834 U JP S6212834U JP 10394885 U JP10394885 U JP 10394885U JP 10394885 U JP10394885 U JP 10394885U JP S6212834 U JPS6212834 U JP S6212834U

Authority

JP

Japan

Prior art keywords

semiconductor

signal

sensor chip

chip

electrical output

Prior art date

1985-07-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000011521 glass Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 239000002419 bulk glass Substances 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000010408 film Substances 0.000 description 2
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1