JPS62127743U - - Google Patents
Info
- Publication number
- JPS62127743U JPS62127743U JP1404386U JP1404386U JPS62127743U JP S62127743 U JPS62127743 U JP S62127743U JP 1404386 U JP1404386 U JP 1404386U JP 1404386 U JP1404386 U JP 1404386U JP S62127743 U JPS62127743 U JP S62127743U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- discharge pipe
- setting table
- cleaning
- exits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1404386U JPS62127743U (enExample) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1404386U JPS62127743U (enExample) | 1986-02-04 | 1986-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62127743U true JPS62127743U (enExample) | 1987-08-13 |
Family
ID=30803667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1404386U Pending JPS62127743U (enExample) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62127743U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022527664A (ja) * | 2019-05-08 | 2022-06-02 | 北京北方華創微電子装備有限公司 | クリーニング・チャンバおよびクリーニング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258458A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Spinner cleaning and drying mechanism |
-
1986
- 1986-02-04 JP JP1404386U patent/JPS62127743U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258458A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Spinner cleaning and drying mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022527664A (ja) * | 2019-05-08 | 2022-06-02 | 北京北方華創微電子装備有限公司 | クリーニング・チャンバおよびクリーニング装置 |