JPS62127743U - - Google Patents

Info

Publication number
JPS62127743U
JPS62127743U JP1404386U JP1404386U JPS62127743U JP S62127743 U JPS62127743 U JP S62127743U JP 1404386 U JP1404386 U JP 1404386U JP 1404386 U JP1404386 U JP 1404386U JP S62127743 U JPS62127743 U JP S62127743U
Authority
JP
Japan
Prior art keywords
workpiece
discharge pipe
setting table
cleaning
exits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1404386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1404386U priority Critical patent/JPS62127743U/ja
Publication of JPS62127743U publication Critical patent/JPS62127743U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
JP1404386U 1986-02-04 1986-02-04 Pending JPS62127743U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1404386U JPS62127743U (enExample) 1986-02-04 1986-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1404386U JPS62127743U (enExample) 1986-02-04 1986-02-04

Publications (1)

Publication Number Publication Date
JPS62127743U true JPS62127743U (enExample) 1987-08-13

Family

ID=30803667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1404386U Pending JPS62127743U (enExample) 1986-02-04 1986-02-04

Country Status (1)

Country Link
JP (1) JPS62127743U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022527664A (ja) * 2019-05-08 2022-06-02 北京北方華創微電子装備有限公司 クリーニング・チャンバおよびクリーニング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258458A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Spinner cleaning and drying mechanism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258458A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Spinner cleaning and drying mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022527664A (ja) * 2019-05-08 2022-06-02 北京北方華創微電子装備有限公司 クリーニング・チャンバおよびクリーニング装置

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