JPS62127677A - Heating device for parts - Google Patents

Abstract

PURPOSE:To heat parts speedily while movement distance is short by covering a heating device for the parts in double structure consisting of a duct and a cover and heating the parts in the duct by utilizing contacting heat conduction and forcible convention of ambient temperature in combination. CONSTITUTION:The duct 5 is constituted covering the outer periphery of a preheating table 2 and the cover 6 is constituted covering the duct 5. Dry air from injection ports 9 and 10 is sent in the hollow part s of preheating table and heat-return table 12 and between the outside of the preheating table 2 and the inside of the duct 5 and dry air passed through the hollow part of the heat-return table 12 is sent in between the outside of the duct 5 and the inside of the cover 6.The parts 4 which move on the preheating table 2 by a transport table 1 are heated by the heat conduction from the preheating table 2 while its outer periphery is heated with heating air in the duct 5. The parts 4 exiting from a testing device 8 passes over the heat-return table 12 covered with only the cover 6 and is heated speedily up to the temperature of the dry air without any dew condensation.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a heating device for parts used in temperature testing of semiconductor parts.

(b) Purpose of the Invention This invention involves transporting parts from a storage location to a location with a temperature testing device, performing a temperature test, returning the parts to room temperature after the temperature test, and transporting them to another storage location. In some cases, a heating device that heats parts during transportation so that a temperature test can be performed immediately after the parts arrive at the temperature test equipment has a short heating period, and the parts that have undergone the temperature test are brought to room temperature. To provide a heating device which prevents dew condensation on parts even if left for a long time.

(C) Examples of the invention First, FIG. 1 shows a main part configuration diagram according to the present invention.

In FIG. 1, 1 is a transport platform, 2 is a preheating table, 3 is a drive mechanism, 4 is a component, and 12 is a heat return table.

The carrier 1 is constructed in such a way that the component 4 does not become unstable when the component 4 is placed on the carrier 1. If the part 4 has a lead wire attached, make a hole in the carrier 1 to accommodate the lead wire, insert the lead wire into this hole, and the part 4
can be placed on the carrier 1 in a stable manner.

In FIG. 1, the upper part of the preheating table 2 and the -1 part of the heat return table 12 are configured to have a concave shape, and are arranged so that the concave shape of the preheating table 2 and the concave shape of the heat return table 12 are continuous. .

Then, the - part on the ■ side of the carrier 2 is made convex so that it fits into the concave shape of the preheating table 2 and the concave shape of the heat return table The top part can be moved.

The drive mechanism 3 has a transport platform J that connects the upper part of the preheating table 2 and the heat return table 12.
An arm 7 extends from the drive mechanism 3 to the front part of the carrier 1.

As shown in Fig. 1, when the arm 7 is moved in the direction of the arrow by the drive mechanism 3, the arm 7 moves while pressing 'JAffi< on the carrier 1, so that the carrier 1 is connected to the upper part of the preheating table 2 and the heat return table. -1 part of 12 will be moved.

The preheating table 2 and the two heat return units 12 are hollow in the interior along the direction of the moving force of the transporting metal work, and heated air is sent into the hollow parts.

The once range used in normal temperature tests is 0°C to 70°
C, the heated air in this temperature range is sent into the hollow part of the preheating table 2 from the end of the preheating table 2.

Furthermore, dry air that has passed through the hollow part of the heat return table 12 is fed into the outside of the duct 5 and the inside of the cover 6.

Next, a top view of an embodiment according to the present invention is shown in FIG. 2, and a side view is shown in FIG. 3.

In FIGS. 2 and 3, 5 is a duct, 6 is a cover, 8 is a test device, 9 and 10 are pipes II, and 11 is an outlet.

The duct 5 is configured to cover the outer periphery of the preheating table 2, and the cover 6 is configured to cover the duct 5.

The length of the duct 5 in FIG. 3 is Ll, and the length of the cover 6 is L2, which is longer than Ll.

Therefore, there is no duct 5 on both sides of FIG. 3, and there is only a cover 6.

The process of sending heated air into the hollow part of the preheating table 2 in FIG. That is, the injection port 9 opens into the hollow part of the preheating table 2 and the duct 5 as shown in FIG.

The heated air injected into the duct 5 and the hollow part of the preheating stand 2 is discharged to the outside air from the outlet 11.

As a result, the outer periphery of the component 4 being moved from the preheating table 2 on the transport platform 1 is heated by the heated air in the duct 5 while being heated by heat conduction from the preheating table 2.

Furthermore, dry air that has passed through the hollow portion of the heat return table 12 is fed between the outside of the duct 5 and the inside of the cover 6. The temperature of this dry air is usually 25
kept at ℃.

In FIG. 3, dry air is injected from the inlet 10 and blown out from both ends of the cover 8 to the outside air.

The reason why dry air is sent between the duct 5 and the cover 6 is to prevent the preheating stand 2, the parts 4, and the duct 5 from coming into contact with moisture-containing outside air.

For example, when performing a temperature test at 0°C when the outside temperature is 30°C, the temperature difference will be as much as 30°. 5
When exposed to outside air, condensation may occur and water droplets may form.

Furthermore, if the temperature between the duct 5 and the cover 6 is maintained at a constant temperature, the component 4 can always be brought to the test temperature under the same conditions.

Furthermore, if the component 4 that has been subjected to the temperature test in the testing apparatus 8 of FIG. 3 is immediately exposed to the outside temperature, dew condensation may form on the component 4. For example, when the test temperature is O'C and the outside air is 30C, water droplets will form on the surface of the component 4 due to the temperature difference, causing the component 4 to deteriorate.

In FIG. 3, the part 4 leaving the test apparatus 8 passes over the top of the heat return table 12, which is covered only by a cover 6, without the duct 5. Since dry air is pumped into this area,
Even if there is a temperature difference between the test temperature and the dry air, no condensation will occur and the part 4 will be rapidly heated to the temperature of the dry air.

When the part 4 passes through only the cover 6, it is taken out into the outside air, but since there is not much difference between the outside temperature and the temperature of the dry air, no dew condensation forms on the part 4 here.

As an example, when the difference between the outside temperature and the test temperature is 30°C,
In conventional heating devices using only air convection, it took more than 1 hour for the difference between the component temperature and the test temperature to approach within 1°C, but according to the embodiment device of the present invention, It can be accomplished in less than 3 minutes.

In the embodiments shown in FIGS. 1 and 3, the component 4 is returned from the heated state to room temperature using the heat return table 12, but the preheating table 2 is extended and the dry air is introduced into the cover 6 from the right end in FIG. It may also be injected into the

(d) Effects of the Invention According to this invention, the component heating device is covered with a double structure of a duct and a cover, and the components inside the duct are heated by a combination of contact heat conduction and forced convection due to the ambient temperature. Because there are
Parts can be heated quickly over short travel distances.

Furthermore, since the parts are passed through dry air after the test, it is possible to prevent dew condensation from forming on the parts.

[Brief explanation of drawings]

FIG. 1 is a block diagram of the main parts according to this invention, FIG. 2 is a front view of an embodiment based on this research, and FIG. 3 is a side view of an embodiment according to this invention. 1...Transportation stand, 2...Preheating stand, 3...
... Drive mechanism, 4 ... Parts, 5 ...
・Duct, 6... Cover, 7... f-... Arm, 8... Test device, 9...
・Inlet, 10... Inlet, 11...
Air outlet, 12...Heat return table. Agent: Patent Attorney Kinji Omata] 1 Figure 2 Parts Transport platform

Claims (1)

[Claims] 1. A carrier (1) on which a component (4) is placed; a preheating platform (2) configured to be able to move the carrier (1) and having a hollow interior along the moving direction; A drive mechanism (3) for moving the carrier (1) on the preheating table (2), the dimension of the carrier (1) in the moving direction is L1, and the preheating table (2)
a duct (5) that covers the outer periphery of the transport platform (1);
A cover (6) that covers the outer periphery of the duct (5) is provided to send heated air into the hollow part of the preheating stand (2), and a cover (6) that covers the outer periphery of the duct (5), and a Inject heated air and dry air between the outside of the duct (5) and the inside of the cover (6), and place the carrier (1) carrying the parts (4) on the preheating table (2). the carrier (1) is moved by the drive mechanism (3),
The part (4) passes from inside the duct (5) through the part of the cover (6) where the duct (5) does not exist, and after passing through the dry air, the part (4) is carried out to the outside of the cover (6). A heating device for parts featuring: