JPS62127653U - - Google Patents

Info

Publication number
JPS62127653U
JPS62127653U JP1470086U JP1470086U JPS62127653U JP S62127653 U JPS62127653 U JP S62127653U JP 1470086 U JP1470086 U JP 1470086U JP 1470086 U JP1470086 U JP 1470086U JP S62127653 U JPS62127653 U JP S62127653U
Authority
JP
Japan
Prior art keywords
electron beam
lens
slit
beam generator
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1470086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1470086U priority Critical patent/JPS62127653U/ja
Publication of JPS62127653U publication Critical patent/JPS62127653U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP1470086U 1986-02-03 1986-02-03 Pending JPS62127653U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1470086U JPS62127653U (US20100056889A1-20100304-C00004.png) 1986-02-03 1986-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1470086U JPS62127653U (US20100056889A1-20100304-C00004.png) 1986-02-03 1986-02-03

Publications (1)

Publication Number Publication Date
JPS62127653U true JPS62127653U (US20100056889A1-20100304-C00004.png) 1987-08-13

Family

ID=30804928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1470086U Pending JPS62127653U (US20100056889A1-20100304-C00004.png) 1986-02-03 1986-02-03

Country Status (1)

Country Link
JP (1) JPS62127653U (US20100056889A1-20100304-C00004.png)

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