JPS62126830U - - Google Patents
Info
- Publication number
- JPS62126830U JPS62126830U JP1398786U JP1398786U JPS62126830U JP S62126830 U JPS62126830 U JP S62126830U JP 1398786 U JP1398786 U JP 1398786U JP 1398786 U JP1398786 U JP 1398786U JP S62126830 U JPS62126830 U JP S62126830U
- Authority
- JP
- Japan
- Prior art keywords
- heating
- plate
- heater
- planar heater
- heating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398786U JPS62126830U (pt) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398786U JPS62126830U (pt) | 1986-02-04 | 1986-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126830U true JPS62126830U (pt) | 1987-08-12 |
Family
ID=30803559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1398786U Pending JPS62126830U (pt) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126830U (pt) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50156049A (pt) * | 1974-05-10 | 1975-12-16 | ||
| JPS5821332A (ja) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | 半導体ウエハにレジストをベ−キングする装置 |
| JPS6123321A (ja) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | 半導体ウエ−ハのベ−キング装置 |
-
1986
- 1986-02-04 JP JP1398786U patent/JPS62126830U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50156049A (pt) * | 1974-05-10 | 1975-12-16 | ||
| JPS5821332A (ja) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | 半導体ウエハにレジストをベ−キングする装置 |
| JPS6123321A (ja) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | 半導体ウエ−ハのベ−キング装置 |
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