JPS62126827U - - Google Patents

Info

Publication number

JPS62126827U

JPS62126827U JP1277986U JP1277986U JPS62126827U JP S62126827 U JPS62126827 U JP S62126827U JP 1277986 U JP1277986 U JP 1277986U JP 1277986 U JP1277986 U JP 1277986U JP S62126827 U JPS62126827 U JP S62126827U

Authority

JP

Japan

Prior art keywords

metal

bellgear

vapor phase

bell gear

phase growth

Prior art date

1986-01-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 6
• 239000002184 metal Substances 0.000 claims description 5
• 239000010453 quartz Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 238000001947 vapour-phase growth Methods 0.000 claims 3
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1