JPS62126359U - - Google Patents
Info
- Publication number
- JPS62126359U JPS62126359U JP1412686U JP1412686U JPS62126359U JP S62126359 U JPS62126359 U JP S62126359U JP 1412686 U JP1412686 U JP 1412686U JP 1412686 U JP1412686 U JP 1412686U JP S62126359 U JPS62126359 U JP S62126359U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- forming apparatus
- porous member
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1412686U JPS62126359U (en:Method) | 1986-02-03 | 1986-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1412686U JPS62126359U (en:Method) | 1986-02-03 | 1986-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126359U true JPS62126359U (en:Method) | 1987-08-11 |
Family
ID=30803824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1412686U Pending JPS62126359U (en:Method) | 1986-02-03 | 1986-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126359U (en:Method) |
-
1986
- 1986-02-03 JP JP1412686U patent/JPS62126359U/ja active Pending
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