JPS62126359U - - Google Patents

Info

Publication number
JPS62126359U
JPS62126359U JP1412686U JP1412686U JPS62126359U JP S62126359 U JPS62126359 U JP S62126359U JP 1412686 U JP1412686 U JP 1412686U JP 1412686 U JP1412686 U JP 1412686U JP S62126359 U JPS62126359 U JP S62126359U
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming apparatus
porous member
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1412686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1412686U priority Critical patent/JPS62126359U/ja
Publication of JPS62126359U publication Critical patent/JPS62126359U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1412686U 1986-02-03 1986-02-03 Pending JPS62126359U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1412686U JPS62126359U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1412686U JPS62126359U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Publications (1)

Publication Number Publication Date
JPS62126359U true JPS62126359U (enrdf_load_stackoverflow) 1987-08-11

Family

ID=30803824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1412686U Pending JPS62126359U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Country Status (1)

Country Link
JP (1) JPS62126359U (enrdf_load_stackoverflow)

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