JPH01125360U - - Google Patents

Info

Publication number
JPH01125360U
JPH01125360U JP2167588U JP2167588U JPH01125360U JP H01125360 U JPH01125360 U JP H01125360U JP 2167588 U JP2167588 U JP 2167588U JP 2167588 U JP2167588 U JP 2167588U JP H01125360 U JPH01125360 U JP H01125360U
Authority
JP
Japan
Prior art keywords
thin film
mesh
substrate
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2167588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2167588U priority Critical patent/JPH01125360U/ja
Publication of JPH01125360U publication Critical patent/JPH01125360U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2167588U 1988-02-20 1988-02-20 Pending JPH01125360U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2167588U JPH01125360U (enrdf_load_stackoverflow) 1988-02-20 1988-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2167588U JPH01125360U (enrdf_load_stackoverflow) 1988-02-20 1988-02-20

Publications (1)

Publication Number Publication Date
JPH01125360U true JPH01125360U (enrdf_load_stackoverflow) 1989-08-25

Family

ID=31239118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2167588U Pending JPH01125360U (enrdf_load_stackoverflow) 1988-02-20 1988-02-20

Country Status (1)

Country Link
JP (1) JPH01125360U (enrdf_load_stackoverflow)

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