JPS62126283U - - Google Patents

Info

Publication number
JPS62126283U
JPS62126283U JP1379386U JP1379386U JPS62126283U JP S62126283 U JPS62126283 U JP S62126283U JP 1379386 U JP1379386 U JP 1379386U JP 1379386 U JP1379386 U JP 1379386U JP S62126283 U JPS62126283 U JP S62126283U
Authority
JP
Japan
Prior art keywords
liquid passage
substrate
hole
passage recess
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1379386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441977Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986013793U priority Critical patent/JPH0441977Y2/ja
Publication of JPS62126283U publication Critical patent/JPS62126283U/ja
Application granted granted Critical
Publication of JPH0441977Y2 publication Critical patent/JPH0441977Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Coating Apparatus (AREA)
JP1986013793U 1986-01-31 1986-01-31 Expired JPH0441977Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986013793U JPH0441977Y2 (no) 1986-01-31 1986-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986013793U JPH0441977Y2 (no) 1986-01-31 1986-01-31

Publications (2)

Publication Number Publication Date
JPS62126283U true JPS62126283U (no) 1987-08-11
JPH0441977Y2 JPH0441977Y2 (no) 1992-10-02

Family

ID=30803189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986013793U Expired JPH0441977Y2 (no) 1986-01-31 1986-01-31

Country Status (1)

Country Link
JP (1) JPH0441977Y2 (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143970A (ja) * 1986-12-09 1988-06-16 Tokyo Electron Ltd 基板載置台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982257U (ja) * 1982-11-25 1984-06-02 株式会社東芝 レジスト塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982257U (ja) * 1982-11-25 1984-06-02 株式会社東芝 レジスト塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143970A (ja) * 1986-12-09 1988-06-16 Tokyo Electron Ltd 基板載置台

Also Published As

Publication number Publication date
JPH0441977Y2 (no) 1992-10-02

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