JPS62126283U - - Google Patents
Info
- Publication number
- JPS62126283U JPS62126283U JP1379386U JP1379386U JPS62126283U JP S62126283 U JPS62126283 U JP S62126283U JP 1379386 U JP1379386 U JP 1379386U JP 1379386 U JP1379386 U JP 1379386U JP S62126283 U JPS62126283 U JP S62126283U
- Authority
- JP
- Japan
- Prior art keywords
- liquid passage
- substrate
- hole
- passage recess
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 12
Landscapes
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986013793U JPH0441977Y2 (da) | 1986-01-31 | 1986-01-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986013793U JPH0441977Y2 (da) | 1986-01-31 | 1986-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62126283U true JPS62126283U (da) | 1987-08-11 |
JPH0441977Y2 JPH0441977Y2 (da) | 1992-10-02 |
Family
ID=30803189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986013793U Expired JPH0441977Y2 (da) | 1986-01-31 | 1986-01-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0441977Y2 (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143970A (ja) * | 1986-12-09 | 1988-06-16 | Tokyo Electron Ltd | 基板載置台 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982257U (ja) * | 1982-11-25 | 1984-06-02 | 株式会社東芝 | レジスト塗布装置 |
-
1986
- 1986-01-31 JP JP1986013793U patent/JPH0441977Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982257U (ja) * | 1982-11-25 | 1984-06-02 | 株式会社東芝 | レジスト塗布装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143970A (ja) * | 1986-12-09 | 1988-06-16 | Tokyo Electron Ltd | 基板載置台 |
Also Published As
Publication number | Publication date |
---|---|
JPH0441977Y2 (da) | 1992-10-02 |
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