JPS62124850A - 位置決めテ−ブル装置 - Google Patents

位置決めテ−ブル装置

Info

Publication number
JPS62124850A
JPS62124850A JP26429985A JP26429985A JPS62124850A JP S62124850 A JPS62124850 A JP S62124850A JP 26429985 A JP26429985 A JP 26429985A JP 26429985 A JP26429985 A JP 26429985A JP S62124850 A JPS62124850 A JP S62124850A
Authority
JP
Japan
Prior art keywords
piezoelectric element
effect
sliding
piezoelectric
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26429985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373416B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuma Suzuki
数馬 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP26429985A priority Critical patent/JPS62124850A/ja
Publication of JPS62124850A publication Critical patent/JPS62124850A/ja
Publication of JPH0373416B2 publication Critical patent/JPH0373416B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Conveyors (AREA)
  • Machine Tool Units (AREA)
  • Non-Mechanical Conveyors (AREA)
JP26429985A 1985-11-25 1985-11-25 位置決めテ−ブル装置 Granted JPS62124850A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26429985A JPS62124850A (ja) 1985-11-25 1985-11-25 位置決めテ−ブル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26429985A JPS62124850A (ja) 1985-11-25 1985-11-25 位置決めテ−ブル装置

Publications (2)

Publication Number Publication Date
JPS62124850A true JPS62124850A (ja) 1987-06-06
JPH0373416B2 JPH0373416B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-21

Family

ID=17401243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26429985A Granted JPS62124850A (ja) 1985-11-25 1985-11-25 位置決めテ−ブル装置

Country Status (1)

Country Link
JP (1) JPS62124850A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003244978A (ja) * 2002-02-21 2003-08-29 Iai:Kk ステージと該ステージに使用される超音波モータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003244978A (ja) * 2002-02-21 2003-08-29 Iai:Kk ステージと該ステージに使用される超音波モータ

Also Published As

Publication number Publication date
JPH0373416B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-21

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