JPS6212443B2 - - Google Patents

Info

Publication number
JPS6212443B2
JPS6212443B2 JP21525181A JP21525181A JPS6212443B2 JP S6212443 B2 JPS6212443 B2 JP S6212443B2 JP 21525181 A JP21525181 A JP 21525181A JP 21525181 A JP21525181 A JP 21525181A JP S6212443 B2 JPS6212443 B2 JP S6212443B2
Authority
JP
Japan
Prior art keywords
light
signal
image sensor
target
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21525181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58111703A (ja
Inventor
Toshitsugu Ueda
Eiji Ogita
Yutaka Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YOKOKAWA DENKI KK
Original Assignee
YOKOKAWA DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YOKOKAWA DENKI KK filed Critical YOKOKAWA DENKI KK
Priority to JP21525181A priority Critical patent/JPS58111703A/ja
Publication of JPS58111703A publication Critical patent/JPS58111703A/ja
Publication of JPS6212443B2 publication Critical patent/JPS6212443B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP21525181A 1981-12-25 1981-12-25 スペックル応用測定装置 Granted JPS58111703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21525181A JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21525181A JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Publications (2)

Publication Number Publication Date
JPS58111703A JPS58111703A (ja) 1983-07-02
JPS6212443B2 true JPS6212443B2 (enrdf_load_stackoverflow) 1987-03-18

Family

ID=16669214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21525181A Granted JPS58111703A (ja) 1981-12-25 1981-12-25 スペックル応用測定装置

Country Status (1)

Country Link
JP (1) JPS58111703A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5764189B2 (ja) * 2013-12-13 2015-08-12 國防部軍備局中山科學研究院 精密角度位置決め装置

Also Published As

Publication number Publication date
JPS58111703A (ja) 1983-07-02

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