JPS62120342U - - Google Patents
Info
- Publication number
- JPS62120342U JPS62120342U JP671286U JP671286U JPS62120342U JP S62120342 U JPS62120342 U JP S62120342U JP 671286 U JP671286 U JP 671286U JP 671286 U JP671286 U JP 671286U JP S62120342 U JPS62120342 U JP S62120342U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning solution
- solution
- temperature
- developing
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP671286U JPS62120342U (xx) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP671286U JPS62120342U (xx) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120342U true JPS62120342U (xx) | 1987-07-30 |
Family
ID=30789482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP671286U Pending JPS62120342U (xx) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120342U (xx) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001007017A (ja) * | 1999-04-21 | 2001-01-12 | Sharp Corp | レジスト剥離装置 |
| JP2001102297A (ja) * | 1999-07-28 | 2001-04-13 | Tokyo Electron Ltd | 基板処理装置及びその方法 |
| JP2009510722A (ja) * | 2005-09-26 | 2009-03-12 | セメス・カンパニー・リミテッド | 基板処理装置及び基板処理方法 |
-
1986
- 1986-01-21 JP JP671286U patent/JPS62120342U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001007017A (ja) * | 1999-04-21 | 2001-01-12 | Sharp Corp | レジスト剥離装置 |
| JP2001102297A (ja) * | 1999-07-28 | 2001-04-13 | Tokyo Electron Ltd | 基板処理装置及びその方法 |
| JP2009510722A (ja) * | 2005-09-26 | 2009-03-12 | セメス・カンパニー・リミテッド | 基板処理装置及び基板処理方法 |