JPS62120339U - - Google Patents
Info
- Publication number
- JPS62120339U JPS62120339U JP1986007037U JP703786U JPS62120339U JP S62120339 U JPS62120339 U JP S62120339U JP 1986007037 U JP1986007037 U JP 1986007037U JP 703786 U JP703786 U JP 703786U JP S62120339 U JPS62120339 U JP S62120339U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- semiconductor wafer
- plate
- diffusion
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986007037U JPS62120339U (enExample) | 1986-01-21 | 1986-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986007037U JPS62120339U (enExample) | 1986-01-21 | 1986-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120339U true JPS62120339U (enExample) | 1987-07-30 |
Family
ID=30790118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986007037U Pending JPS62120339U (enExample) | 1986-01-21 | 1986-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120339U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |
-
1986
- 1986-01-21 JP JP1986007037U patent/JPS62120339U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167625A (en) * | 1980-11-24 | 1982-10-15 | Ee Esu Kiyuu Bootsu Inc | Quartz boat for machining semiconductor wafer |