JPS62120255U - - Google Patents
Info
- Publication number
- JPS62120255U JPS62120255U JP863986U JP863986U JPS62120255U JP S62120255 U JPS62120255 U JP S62120255U JP 863986 U JP863986 U JP 863986U JP 863986 U JP863986 U JP 863986U JP S62120255 U JPS62120255 U JP S62120255U
- Authority
- JP
- Japan
- Prior art keywords
- high pressure
- mercury lamp
- pressure mercury
- ultra
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 description 4
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
- H01J61/523—Heating or cooling particular parts of the lamp
Description
第１図は本考案の一実施例の側面図であり、第
２図は第１図の電極部分の斜視図である。第３図
は従来の超高圧水銀灯の放熱フインブロツクの取
り付け状態を示す側面図である。第４図は、放熱
フインブロツクの斜視図である。
なお、図において、１…超高圧水銀灯、１ａ…
管球部、２…放熱フインブロツク、３…電極コー
ド、４…止めネジ、５…（＋）電極、６…（−）
電極、７…放熱フイン、である。
FIG. 1 is a side view of one embodiment of the present invention, and FIG. 2 is a perspective view of the electrode portion of FIG. 1. FIG. 3 is a side view showing how the heat dissipation fin block of a conventional ultra-high pressure mercury lamp is attached. FIG. 4 is a perspective view of the heat dissipation fin block. In addition, in the figure, 1... super high pressure mercury lamp, 1a...
Tube section, 2... Heat dissipation fin block, 3... Electrode cord, 4... Set screw, 5... (+) electrode, 6... (-)
Electrode 7... Heat dissipation fin.
Claims (1)
ンを設けたことを特徴とする半導体ウエハ露出用
超高圧水銀灯。 An ultra-high pressure mercury lamp for exposing semiconductor wafers, characterized in that each electrode part is provided with a plurality of heat radiation fins integrated with the electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP863986U JPS62120255U (en) | 1986-01-23 | 1986-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP863986U JPS62120255U (en) | 1986-01-23 | 1986-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120255U true JPS62120255U (en) | 1987-07-30 |
Family
ID=30793203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP863986U Pending JPS62120255U (en) | 1986-01-23 | 1986-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120255U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0582089A (en) * | 1991-09-25 | 1993-04-02 | Toshiba Lighting & Technol Corp | High pressure metal vapor discharge lamp |
| WO2010130544A1 (en) * | 2009-05-15 | 2010-11-18 | Osram Gesellschaft mit beschränkter Haftung | High-pressure discharge lamp having cooling element |
-
1986
- 1986-01-23 JP JP863986U patent/JPS62120255U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0582089A (en) * | 1991-09-25 | 1993-04-02 | Toshiba Lighting & Technol Corp | High pressure metal vapor discharge lamp |
| WO2010130544A1 (en) * | 2009-05-15 | 2010-11-18 | Osram Gesellschaft mit beschränkter Haftung | High-pressure discharge lamp having cooling element |