JPS62117559U - - Google Patents
Info
- Publication number
- JPS62117559U JPS62117559U JP567186U JP567186U JPS62117559U JP S62117559 U JPS62117559 U JP S62117559U JP 567186 U JP567186 U JP 567186U JP 567186 U JP567186 U JP 567186U JP S62117559 U JPS62117559 U JP S62117559U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- light source
- light
- detecting
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP567186U JPS62117559U (fr) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP567186U JPS62117559U (fr) | 1986-01-17 | 1986-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62117559U true JPS62117559U (fr) | 1987-07-25 |
Family
ID=30787473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP567186U Pending JPS62117559U (fr) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62117559U (fr) |
-
1986
- 1986-01-17 JP JP567186U patent/JPS62117559U/ja active Pending
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