JPS62116435U - - Google Patents

Info

Publication number
JPS62116435U
JPS62116435U JP497186U JP497186U JPS62116435U JP S62116435 U JPS62116435 U JP S62116435U JP 497186 U JP497186 U JP 497186U JP 497186 U JP497186 U JP 497186U JP S62116435 U JPS62116435 U JP S62116435U
Authority
JP
Japan
Prior art keywords
electrode
outside
ion source
electrodes
mounting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP497186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720837Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986004971U priority Critical patent/JPH0720837Y2/ja
Publication of JPS62116435U publication Critical patent/JPS62116435U/ja
Application granted granted Critical
Publication of JPH0720837Y2 publication Critical patent/JPH0720837Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1986004971U 1986-01-16 1986-01-16 イオン源 Expired - Lifetime JPH0720837Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986004971U JPH0720837Y2 (ja) 1986-01-16 1986-01-16 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986004971U JPH0720837Y2 (ja) 1986-01-16 1986-01-16 イオン源

Publications (2)

Publication Number Publication Date
JPS62116435U true JPS62116435U (enExample) 1987-07-24
JPH0720837Y2 JPH0720837Y2 (ja) 1995-05-15

Family

ID=30786124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986004971U Expired - Lifetime JPH0720837Y2 (ja) 1986-01-16 1986-01-16 イオン源

Country Status (1)

Country Link
JP (1) JPH0720837Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018510471A (ja) * 2015-03-31 2018-04-12 アクセリス テクノロジーズ， インコーポレイテッド イオン源用の統合型引き出し電極マニピュレーター

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947961U (ja) * 1982-09-22 1984-03-30 株式会社明石製作所 電子銃

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947961U (ja) * 1982-09-22 1984-03-30 株式会社明石製作所 電子銃

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018510471A (ja) * 2015-03-31 2018-04-12 アクセリス テクノロジーズ， インコーポレイテッド イオン源用の統合型引き出し電極マニピュレーター

Also Published As

Publication number Publication date
JPH0720837Y2 (ja) 1995-05-15

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