JPS6211503B2 - - Google Patents
Info
- Publication number
- JPS6211503B2 JPS6211503B2 JP57069820A JP6982082A JPS6211503B2 JP S6211503 B2 JPS6211503 B2 JP S6211503B2 JP 57069820 A JP57069820 A JP 57069820A JP 6982082 A JP6982082 A JP 6982082A JP S6211503 B2 JPS6211503 B2 JP S6211503B2
- Authority
- JP
- Japan
- Prior art keywords
- roller
- wafer
- end surface
- guide
- orientation flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Feeding Of Articles To Conveyors (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6982082A JPS58186946A (ja) | 1982-04-26 | 1982-04-26 | ウエハの位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6982082A JPS58186946A (ja) | 1982-04-26 | 1982-04-26 | ウエハの位置決め装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58186946A JPS58186946A (ja) | 1983-11-01 |
| JPS6211503B2 true JPS6211503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-03-12 |
Family
ID=13413773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6982082A Granted JPS58186946A (ja) | 1982-04-26 | 1982-04-26 | ウエハの位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58186946A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60130217U (ja) * | 1984-02-10 | 1985-08-31 | 株式会社精工舎 | インデツクス付き部品の供給装置 |
| JPH0613962B2 (ja) * | 1985-08-14 | 1994-02-23 | 日立電子株式会社 | Ｉｃウエハの自動位置決め装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3297134A (en) * | 1966-02-10 | 1967-01-10 | Ronald F Pastuszak | Orienting device for discs and the like articles |
| JPS50122879A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-03-13 | 1975-09-26 | ||
| JPS5238905U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-09-12 | 1977-03-18 | ||
| JPS5392667A (en) * | 1977-01-25 | 1978-08-14 | Tokyo Seimitsu Co Ltd | Device for positioning wafer |
-
1982
- 1982-04-26 JP JP6982082A patent/JPS58186946A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58186946A (ja) | 1983-11-01 |