JPS62114438U - - Google Patents
Info
- Publication number
- JPS62114438U JPS62114438U JP164786U JP164786U JPS62114438U JP S62114438 U JPS62114438 U JP S62114438U JP 164786 U JP164786 U JP 164786U JP 164786 U JP164786 U JP 164786U JP S62114438 U JPS62114438 U JP S62114438U
- Authority
- JP
- Japan
- Prior art keywords
- moving body
- stage
- drive device
- stage drive
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP164786U JPH0644093Y2 (ja) | 1986-01-10 | 1986-01-10 | ステ−ジ駆動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP164786U JPH0644093Y2 (ja) | 1986-01-10 | 1986-01-10 | ステ−ジ駆動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62114438U true JPS62114438U (fr) | 1987-07-21 |
| JPH0644093Y2 JPH0644093Y2 (ja) | 1994-11-14 |
Family
ID=30779753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP164786U Expired - Lifetime JPH0644093Y2 (ja) | 1986-01-10 | 1986-01-10 | ステ−ジ駆動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644093Y2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63223487A (ja) * | 1987-03-10 | 1988-09-16 | 株式会社 アスカル | 高真空型輻射線集中加熱装置 |
| JP2012500492A (ja) * | 2008-08-18 | 2012-01-05 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 荷電粒子ビームリソグラフィシステム及びターゲット位置決め装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003268773A1 (en) * | 2002-10-04 | 2004-04-23 | Tokyo Seimitsu Co., Ltd. | Surface shape measuring apparatus and single-shaft driver for use therein |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394176A (en) * | 1977-01-28 | 1978-08-17 | Fujitsu Ltd | Magnetic shielding device |
| JPS54137978A (en) * | 1978-04-19 | 1979-10-26 | Hitachi Ltd | Electron-beam irradiation unit |
| JPS5636132A (en) * | 1979-08-31 | 1981-04-09 | Jeol Ltd | Sample shifter for electron ray exposing device, etc. |
-
1986
- 1986-01-10 JP JP164786U patent/JPH0644093Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394176A (en) * | 1977-01-28 | 1978-08-17 | Fujitsu Ltd | Magnetic shielding device |
| JPS54137978A (en) * | 1978-04-19 | 1979-10-26 | Hitachi Ltd | Electron-beam irradiation unit |
| JPS5636132A (en) * | 1979-08-31 | 1981-04-09 | Jeol Ltd | Sample shifter for electron ray exposing device, etc. |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63223487A (ja) * | 1987-03-10 | 1988-09-16 | 株式会社 アスカル | 高真空型輻射線集中加熱装置 |
| JP2012500492A (ja) * | 2008-08-18 | 2012-01-05 | マッパー・リソグラフィー・アイピー・ビー．ブイ． | 荷電粒子ビームリソグラフィシステム及びターゲット位置決め装置 |
| JP2013038426A (ja) * | 2008-08-18 | 2013-02-21 | Mapper Lithography Ip Bv | 荷電粒子ビームリソグラフィシステム及びターゲット位置決め装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644093Y2 (ja) | 1994-11-14 |