JPS62112141U - - Google Patents
Info
- Publication number
- JPS62112141U JPS62112141U JP20364985U JP20364985U JPS62112141U JP S62112141 U JPS62112141 U JP S62112141U JP 20364985 U JP20364985 U JP 20364985U JP 20364985 U JP20364985 U JP 20364985U JP S62112141 U JPS62112141 U JP S62112141U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- chamber
- matching circuit
- ion etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000992 sputter etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20364985U JPS62112141U (no) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20364985U JPS62112141U (no) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112141U true JPS62112141U (no) | 1987-07-17 |
Family
ID=31169175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20364985U Pending JPS62112141U (no) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112141U (no) |
-
1985
- 1985-12-28 JP JP20364985U patent/JPS62112141U/ja active Pending