JPS62112136U - - Google Patents
Info
- Publication number
- JPS62112136U JPS62112136U JP1985204140U JP20414085U JPS62112136U JP S62112136 U JPS62112136 U JP S62112136U JP 1985204140 U JP1985204140 U JP 1985204140U JP 20414085 U JP20414085 U JP 20414085U JP S62112136 U JPS62112136 U JP S62112136U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- susceptor
- semiconductor substrate
- supply pipe
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985204140U JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985204140U JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112136U true JPS62112136U (enExample) | 1987-07-17 |
Family
ID=31170117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985204140U Pending JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112136U (enExample) |
-
1985
- 1985-12-28 JP JP1985204140U patent/JPS62112136U/ja active Pending