JPS62112136U - - Google Patents
Info
- Publication number
- JPS62112136U JPS62112136U JP20414085U JP20414085U JPS62112136U JP S62112136 U JPS62112136 U JP S62112136U JP 20414085 U JP20414085 U JP 20414085U JP 20414085 U JP20414085 U JP 20414085U JP S62112136 U JPS62112136 U JP S62112136U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- susceptor
- semiconductor substrate
- supply pipe
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20414085U JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20414085U JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112136U true JPS62112136U (enExample) | 1987-07-17 |
Family
ID=31170117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20414085U Pending JPS62112136U (enExample) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112136U (enExample) |
-
1985
- 1985-12-28 JP JP20414085U patent/JPS62112136U/ja active Pending