JPS62112031U - - Google Patents
Info
- Publication number
- JPS62112031U JPS62112031U JP20478685U JP20478685U JPS62112031U JP S62112031 U JPS62112031 U JP S62112031U JP 20478685 U JP20478685 U JP 20478685U JP 20478685 U JP20478685 U JP 20478685U JP S62112031 U JPS62112031 U JP S62112031U
- Authority
- JP
- Japan
- Prior art keywords
- blow
- clean room
- box
- port
- performance filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20478685U JPS62112031U (en)van) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20478685U JPS62112031U (en)van) | 1985-12-28 | 1985-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112031U true JPS62112031U (en)van) | 1987-07-16 |
Family
ID=31170778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20478685U Pending JPS62112031U (en)van) | 1985-12-28 | 1985-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112031U (en)van) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03129843U (en)van) * | 1990-04-12 | 1991-12-26 | ||
| JP2014176787A (ja) * | 2013-03-14 | 2014-09-25 | Panasonic Corp | 除塵ブース |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5151144A (en) * | 1974-10-31 | 1976-05-06 | Nippon Telegraph & Telephone | Kuriineakyokyusochi |
| JPS60140034A (ja) * | 1983-12-28 | 1985-07-24 | Taikisha Ltd | クリ−ンル−ム |
-
1985
- 1985-12-28 JP JP20478685U patent/JPS62112031U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5151144A (en) * | 1974-10-31 | 1976-05-06 | Nippon Telegraph & Telephone | Kuriineakyokyusochi |
| JPS60140034A (ja) * | 1983-12-28 | 1985-07-24 | Taikisha Ltd | クリ−ンル−ム |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03129843U (en)van) * | 1990-04-12 | 1991-12-26 | ||
| JP2014176787A (ja) * | 2013-03-14 | 2014-09-25 | Panasonic Corp | 除塵ブース |