JPS62110264U - - Google Patents
Info
- Publication number
- JPS62110264U JPS62110264U JP20281885U JP20281885U JPS62110264U JP S62110264 U JPS62110264 U JP S62110264U JP 20281885 U JP20281885 U JP 20281885U JP 20281885 U JP20281885 U JP 20281885U JP S62110264 U JPS62110264 U JP S62110264U
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- ion plating
- vacuum chamber
- hole connected
- ionized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20281885U JPS62110264U ( ) | 1985-12-28 | 1985-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20281885U JPS62110264U ( ) | 1985-12-28 | 1985-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62110264U true JPS62110264U ( ) | 1987-07-14 |
Family
ID=31167557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20281885U Pending JPS62110264U ( ) | 1985-12-28 | 1985-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62110264U ( ) |
-
1985
- 1985-12-28 JP JP20281885U patent/JPS62110264U/ja active Pending