JPS62110263U - - Google Patents
Info
- Publication number
- JPS62110263U JPS62110263U JP20079485U JP20079485U JPS62110263U JP S62110263 U JPS62110263 U JP S62110263U JP 20079485 U JP20079485 U JP 20079485U JP 20079485 U JP20079485 U JP 20079485U JP S62110263 U JPS62110263 U JP S62110263U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- rotating
- fixed table
- electron beam
- crucibles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20079485U JPS62110263U (ko) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20079485U JPS62110263U (ko) | 1985-12-27 | 1985-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62110263U true JPS62110263U (ko) | 1987-07-14 |
Family
ID=31163644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20079485U Pending JPS62110263U (ko) | 1985-12-27 | 1985-12-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62110263U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101208995B1 (ko) | 2005-04-20 | 2012-12-06 | 주성엔지니어링(주) | 증착용기를 구비하는 증착장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208069A (ja) * | 1983-05-06 | 1984-11-26 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | 多くの物質を蒸着させるための放射加熱部を有する蒸発装置 |
-
1985
- 1985-12-27 JP JP20079485U patent/JPS62110263U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208069A (ja) * | 1983-05-06 | 1984-11-26 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | 多くの物質を蒸着させるための放射加熱部を有する蒸発装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101208995B1 (ko) | 2005-04-20 | 2012-12-06 | 주성엔지니어링(주) | 증착용기를 구비하는 증착장치 |