JPS62109737U - - Google Patents
Info
- Publication number
- JPS62109737U JPS62109737U JP19940485U JP19940485U JPS62109737U JP S62109737 U JPS62109737 U JP S62109737U JP 19940485 U JP19940485 U JP 19940485U JP 19940485 U JP19940485 U JP 19940485U JP S62109737 U JPS62109737 U JP S62109737U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- gas
- switching valve
- transfer pipe
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940485U JPS62109737U (en, 2012) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940485U JPS62109737U (en, 2012) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62109737U true JPS62109737U (en, 2012) | 1987-07-13 |
Family
ID=31160996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19940485U Pending JPS62109737U (en, 2012) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109737U (en, 2012) |
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1985
- 1985-12-27 JP JP19940485U patent/JPS62109737U/ja active Pending