JPS62109498U - - Google Patents

Info

Publication number
JPS62109498U
JPS62109498U JP19961085U JP19961085U JPS62109498U JP S62109498 U JPS62109498 U JP S62109498U JP 19961085 U JP19961085 U JP 19961085U JP 19961085 U JP19961085 U JP 19961085U JP S62109498 U JPS62109498 U JP S62109498U
Authority
JP
Japan
Prior art keywords
transfer means
guide stand
substrate transfer
board
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19961085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328559Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985199610U priority Critical patent/JPH0328559Y2/ja
Publication of JPS62109498U publication Critical patent/JPS62109498U/ja
Application granted granted Critical
Publication of JPH0328559Y2 publication Critical patent/JPH0328559Y2/ja
Expired legal-status Critical Current

Links

JP1985199610U 1985-12-27 1985-12-27 Expired JPH0328559Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985199610U JPH0328559Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985199610U JPH0328559Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109498U true JPS62109498U (enrdf_load_stackoverflow) 1987-07-13
JPH0328559Y2 JPH0328559Y2 (enrdf_load_stackoverflow) 1991-06-19

Family

ID=31161394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985199610U Expired JPH0328559Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0328559Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136447A (ja) * 1985-12-10 1987-06-19 Nippon Kogaku Kk <Nikon> 基板の搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136447A (ja) * 1985-12-10 1987-06-19 Nippon Kogaku Kk <Nikon> 基板の搬送装置

Also Published As

Publication number Publication date
JPH0328559Y2 (enrdf_load_stackoverflow) 1991-06-19

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