JPS62109453U - - Google Patents
Info
- Publication number
- JPS62109453U JPS62109453U JP19940285U JP19940285U JPS62109453U JP S62109453 U JPS62109453 U JP S62109453U JP 19940285 U JP19940285 U JP 19940285U JP 19940285 U JP19940285 U JP 19940285U JP S62109453 U JPS62109453 U JP S62109453U
- Authority
- JP
- Japan
- Prior art keywords
- claw
- wafer
- electromagnet
- arm
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940285U JPS62109453U (no) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940285U JPS62109453U (no) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62109453U true JPS62109453U (no) | 1987-07-13 |
Family
ID=31160992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19940285U Pending JPS62109453U (no) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109453U (no) |
-
1985
- 1985-12-27 JP JP19940285U patent/JPS62109453U/ja active Pending