JPS61125041U - - Google Patents
Info
- Publication number
- JPS61125041U JPS61125041U JP819585U JP819585U JPS61125041U JP S61125041 U JPS61125041 U JP S61125041U JP 819585 U JP819585 U JP 819585U JP 819585 U JP819585 U JP 819585U JP S61125041 U JPS61125041 U JP S61125041U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- semiconductor
- wafer support
- semiconductor manufacturing
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819585U JPS61125041U (no) | 1985-01-23 | 1985-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819585U JPS61125041U (no) | 1985-01-23 | 1985-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61125041U true JPS61125041U (no) | 1986-08-06 |
Family
ID=30487257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP819585U Pending JPS61125041U (no) | 1985-01-23 | 1985-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125041U (no) |
-
1985
- 1985-01-23 JP JP819585U patent/JPS61125041U/ja active Pending