JPS62109342U - - Google Patents
Info
- Publication number
- JPS62109342U JPS62109342U JP20078885U JP20078885U JPS62109342U JP S62109342 U JPS62109342 U JP S62109342U JP 20078885 U JP20078885 U JP 20078885U JP 20078885 U JP20078885 U JP 20078885U JP S62109342 U JPS62109342 U JP S62109342U
- Authority
- JP
- Japan
- Prior art keywords
- electron
- regions
- rocking
- standard sample
- different sizes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005465 channeling Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985200788U JPH0514451Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985200788U JPH0514451Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109342U true JPS62109342U (enExample) | 1987-07-13 |
| JPH0514451Y2 JPH0514451Y2 (enExample) | 1993-04-16 |
Family
ID=31163632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985200788U Expired - Lifetime JPH0514451Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514451Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140546A (ja) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | 照射ビーム径評価用素子及び評価方法 |
| JP2019021524A (ja) * | 2017-07-19 | 2019-02-07 | 株式会社日立製作所 | 試料保持機構、及び荷電粒子線装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5597955A (en) * | 1979-01-18 | 1980-07-25 | Tdk Corp | Screen printing machine |
| JPS58123303A (ja) * | 1982-01-19 | 1983-07-22 | 株式会社東芝 | ガス絶縁開閉装置 |
-
1985
- 1985-12-27 JP JP1985200788U patent/JPH0514451Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5597955A (en) * | 1979-01-18 | 1980-07-25 | Tdk Corp | Screen printing machine |
| JPS58123303A (ja) * | 1982-01-19 | 1983-07-22 | 株式会社東芝 | ガス絶縁開閉装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140546A (ja) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | 照射ビーム径評価用素子及び評価方法 |
| JP2019021524A (ja) * | 2017-07-19 | 2019-02-07 | 株式会社日立製作所 | 試料保持機構、及び荷電粒子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514451Y2 (enExample) | 1993-04-16 |