JPS62109163U - - Google Patents
Info
- Publication number
- JPS62109163U JPS62109163U JP1985199069U JP19906985U JPS62109163U JP S62109163 U JPS62109163 U JP S62109163U JP 1985199069 U JP1985199069 U JP 1985199069U JP 19906985 U JP19906985 U JP 19906985U JP S62109163 U JPS62109163 U JP S62109163U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- utility
- sides
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000059 patterning Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985199069U JPS62109163U (fr) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985199069U JPS62109163U (fr) | 1985-12-26 | 1985-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62109163U true JPS62109163U (fr) | 1987-07-11 |
Family
ID=31160347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985199069U Pending JPS62109163U (fr) | 1985-12-26 | 1985-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62109163U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0293457A (ja) * | 1988-09-29 | 1990-04-04 | Hoya Corp | 両面パターン付きフォトマスクの製造方法 |
-
1985
- 1985-12-26 JP JP1985199069U patent/JPS62109163U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0293457A (ja) * | 1988-09-29 | 1990-04-04 | Hoya Corp | 両面パターン付きフォトマスクの製造方法 |