JPS62107561U - - Google Patents
Info
- Publication number
- JPS62107561U JPS62107561U JP20000785U JP20000785U JPS62107561U JP S62107561 U JPS62107561 U JP S62107561U JP 20000785 U JP20000785 U JP 20000785U JP 20000785 U JP20000785 U JP 20000785U JP S62107561 U JPS62107561 U JP S62107561U
- Authority
- JP
- Japan
- Prior art keywords
- cooling body
- piping
- motor cooling
- body water
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010926 purge Methods 0.000 claims description 4
- 210000000476 body water Anatomy 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Motor Or Generator Cooling System (AREA)
Description
第１図は従来のスピンドルモーター冷却配管図
である。第２図は本考案の一実施例でモーター冷
却体エアーパージ装置を取り付けたスピンドルモ
ーター冷却配管図を示す。
尚図において、１……モーター冷却体、２……
温度センサー、３……温度監視部、４……パージ
コントローラ、５……電磁切り換え弁、６……フ
イルター、７……マニユアル開閉弁、８……水イ
ン側配管、９……高圧エアー配管、１０……水ド
レイン側配管、１１……温度センサー配線、１２
……電磁切り換え弁配線。
FIG. 1 is a diagram of a conventional spindle motor cooling piping. FIG. 2 shows a spindle motor cooling piping diagram in which a motor cooling body air purge device is installed in one embodiment of the present invention. In the figure, 1...motor cooling body, 2...
Temperature sensor, 3...Temperature monitoring unit, 4...Purge controller, 5...Solenoid switching valve, 6...Filter, 7...Manual on/off valve, 8...Water in side piping, 9...High pressure air piping, 10...Water drain side piping, 11...Temperature sensor wiring, 12
...Electromagnetic switching valve wiring.
Claims (1)
体の温度を監視し、冷却体水冷配管のつまりを未
然に検知し、冷却体水冷配管を自動的にエアーパ
ージするモーター冷却体エアーパージ装置。 A motor cooling body air purge device that monitors the temperature of the spindle motor cooling body of a wafer backside polisher, detects blockages in the cooling body water cooling piping, and automatically purges air from the cooling body water cooling piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20000785U JPS62107561U (en) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20000785U JPS62107561U (en) | 1985-12-25 | 1985-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107561U true JPS62107561U (en) | 1987-07-09 |
Family
ID=31162161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20000785U Pending JPS62107561U (en) | 1985-12-25 | 1985-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107561U (en) |
-
1985
- 1985-12-25 JP JP20000785U patent/JPS62107561U/ja active Pending