JPS62107440U - - Google Patents

Info

Publication number
JPS62107440U
JPS62107440U JP19840085U JP19840085U JPS62107440U JP S62107440 U JPS62107440 U JP S62107440U JP 19840085 U JP19840085 U JP 19840085U JP 19840085 U JP19840085 U JP 19840085U JP S62107440 U JPS62107440 U JP S62107440U
Authority
JP
Japan
Prior art keywords
microwave
voltage
sample stage
generating means
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19840085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19840085U priority Critical patent/JPS62107440U/ja
Publication of JPS62107440U publication Critical patent/JPS62107440U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP19840085U 1985-12-25 1985-12-25 Pending JPS62107440U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19840085U JPS62107440U (enExample) 1985-12-25 1985-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19840085U JPS62107440U (enExample) 1985-12-25 1985-12-25

Publications (1)

Publication Number Publication Date
JPS62107440U true JPS62107440U (enExample) 1987-07-09

Family

ID=31159052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19840085U Pending JPS62107440U (enExample) 1985-12-25 1985-12-25

Country Status (1)

Country Link
JP (1) JPS62107440U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779621A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma processing device
JPS60103619A (ja) * 1983-11-11 1985-06-07 Hitachi Ltd プラズマエツチング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5779621A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma processing device
JPS60103619A (ja) * 1983-11-11 1985-06-07 Hitachi Ltd プラズマエツチング装置

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